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1. KR1020200082003 - INSPECTION APPARATUS USING TERAHERTZ WAVE

Office
Republic of Korea
Application Number 1020180172095
Application Date 28.12.2018
Publication Number 1020200082003
Publication Date 08.07.2020
Grant Number 102153450
Grant Date 08.09.2020
Publication Kind B1
IPC
G01N 21/3581
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
17Systems in which incident light is modified in accordance with the properties of the material investigated
25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
35using infra-red light
3581using far infra-red light; using Terahertz radiation
G01N 21/27
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
17Systems in which incident light is modified in accordance with the properties of the material investigated
25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
27using photo-electric detection
CPC
G01N 21/3581
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
17Systems in which incident light is modified in accordance with the properties of the material investigated
25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
35using infra-red light
3581using far infra-red light; using Terahertz radiation
G01N 21/27
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
17Systems in which incident light is modified in accordance with the properties of the material investigated
25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
27using photo-electric detection
Applicants (주)미래컴퍼니
MEERE COMPANY INC.
Inventors KIM CHAN WOONG
LEE YE SOL
CHA BYEOGN CHAN
김찬웅
이예솔
차병찬
Agents 특허법인 비엘티
Title
(EN) INSPECTION APPARATUS USING TERAHERTZ WAVE
(KO) 테라헤르츠파를 이용한 검사장치
Abstract
(EN)
The present invention relates to an inspection apparatus using a terahertz wave, which comprises: a transfer table having a seating unit on which at least one inspection target is seated and forming a transfer path through which the inspection target is transferred; a terahertz light source provided above the transfer path and irradiating the inspection target transferred along the transfer path with the terahertz wave; and a terahertz camera receiving the terahertz wave that is emitted from the terahertz light source and transmitted through the inspection target. The entire or partial region of the seating unit is made of a material through which the terahertz wave is transmitted. COPYRIGHT KIPO 2021

(KO)
본 발명은 테라헤르츠파를 이용한 검사장치에 관한 것으로서, 적어도 하나의 검사대상물이 안착되는 안착부를 가지며, 상기 검사대상물이 이송되는 이송 경로를 형성하는 이송 테이블; 상기 이송 경로의 상방에 마련되어, 상기 이송 경로를 따라 이송되는 상기 검사대상물에 테라헤르츠파를 조사하는 테라헤르츠 광원; 및 상기 테라헤르츠 광원으로부터 조사되어 상기 검사대상물을 투과한 테라헤르츠파를 수신하는 테라헤르츠 카메라를 포함하며, 상기 안착부의 전체 또는 일부 영역은 테라헤르츠파가 투과되는 재질로 이루어진 것을 특징으로 한다.

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