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1. (KR1020190042103) 원통형 타깃의 제조방법 및 원통형 타깃

Office : Republic of Korea
Application Number: 1020197010600 Application Date: 02.02.2017
Publication Number: 1020190042103 Publication Date: 23.04.2019
Publication Kind : A
Prior PCT appl.: Application Number: ; Publication Number:WO2017135349 Click to see the data
IPC:
C23C 14/34
G01B 21/30
H01J 37/34
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22
characterised by the process of coating
34
Sputtering
G PHYSICS
01
MEASURING; TESTING
B
MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
21
Measuring arrangements or details thereof in so far as they are not adapted to particular types of measuring means of the other groups of this subclass
30
for measuring roughness or irregularity of surfaces
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37
Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
32
Gas-filled discharge tubes
34
operating with cathodic sputtering
CPC:
C23C 14/3414
G01B 21/30
H01J 37/3423
H01J 37/3491
Applicants: 스미또모 가가꾸 가부시키가이샤
Inventors: 시라이시 미즈키
스가와라 다쿠토
니시오카 고지
후지타 마사히로
Agents: 특허법인(유)화우
Priority Data: JP-P-2016-021212 05.02.2016 JP
Title: (KO) 원통형 타깃의 제조방법 및 원통형 타깃
Abstract: front page image
(KO) 길이 방향으로 거의 변형을 가지지 않는 원통형 타깃을 제조하는 방법을 제공한다. 본 발명에 관련된 원통형 타깃의 제조방법은, 타깃 재료를 원통형상으로 가공하는 공정과, 원통형상으로 가공된 타깃 재료에, 스퍼터 장치에 부착하기 위한 어댑터를 마련하는 공정과, 어댑터를 가지는 타깃 재료의 진직도가, 미리 규정된 범위 내인지 아닌지를 확인하기 위하여, 어댑터를 가지는 타깃 재료의 외관의 길이 방향에 있어서의 진직도를 측정하는 공정을 포함한다.
Also published as:
KR1020180103173CN108603282US20190041183WO/2017/135349