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1. KR1020180135062 - 웨이퍼 박스 컨베이어

Office Republic of Korea
Application Number 1020187034106
Application Date 28.04.2017
Publication Number 1020180135062
Publication Date 19.12.2018
Grant Number 102090566
Grant Date 18.03.2020
Publication Kind B1
IPC
H01L 21/677
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
677for conveying, e.g. between different work stations
H01L 21/67
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
CPC
H01L 21/6773
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; ; Apparatus not specifically provided for elsewhere
677for conveying, e.g. between different workstations
67703between different workstations
6773Conveying cassettes, containers or carriers
H01L 21/67259
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; ; Apparatus not specifically provided for elsewhere
67005Apparatus not specifically provided for elsewhere
67242Apparatus for monitoring, sorting or marking
67259Position monitoring, e.g. misposition detection or presence detection
H01L 21/67736
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; ; Apparatus not specifically provided for elsewhere
677for conveying, e.g. between different workstations
67703between different workstations
67736Loading to or unloading from a conveyor
Applicants 상하이 마이크로 일렉트로닉스 이큅먼트(그룹) 컴퍼니 리미티드
Inventors 리, 링규
수, 키신
Agents 특허법인 무한
Title
(KO) 웨이퍼 박스 컨베이어
Abstract
(KO)
카세트 운송 장치는 스마트 카트; 상기 스마트 카트에 장착된 베이스 확장 프레임; 및 상기 베이스 확장 프레임에 고정된 카세트-적재 프레임을 포함하는 것으로 개시된다. 상기 카세트 적재 프레임은 각각이 복수의 카세트 트레이를 수용하는 몇몇의 세그먼트로 분할된다. 상기 복수의 카세트 트레이 각각에는, 그것의 표면 상에, 제1트로프 및 상기 제1트로프 내의 제2트로프를 정의한다. 상기 제1트로프는 제1 크기의 카세트를 보유하도록 구성되고, 상기 제2트로프는 제2 크기의 카세트를 보유하도록 구성된다. 제1 트로프 및 제2 트로프로, 각각의 카세트 트레이는 제1 크기 또는 제2 크기 중 어느 하나의 카세트를 보유할 수 있어, 카세트 운송 장치를 높은 수율 카세트의 모든 종류의 운송에 사용 가능하게 한다. 게다가, 스마트 카트는 운송 비용, 시간 및 인력을 절약 가능하게 하면서도 사람 개입 또는 트랙 건설 없이 자동화 운송을 할 수 있다.