1. JP2020107140 - TEMPERATURE CONTROL DEVICE

PROBLEM TO BE SOLVED: To accurately adjust the temperature of a fluid.

SOLUTION: A temperature control device comprises: a smoothing device having a first inlet into which a fluid flows, a smoothing passage through which the fluid flowing in from the first inlet flows, and a first outlet from which the fluid flowing through the smoothing passage flows out, the smoothing device making an amount of temperature change of the fluid in the first outlet smaller than an amount of temperature change of the fluid in the first inlet; a temperature adjustment device having a second inlet into which the fluid flowing out from the first outlet flows, a temperature adjustment passage through which the fluid flowing in from the second inlet flows, a temperature adjustment unit that adjusts a temperature of the fluid flowing through the temperature adjustment passage, and a second outlet from which the fluid flowing through the temperature adjustment passage flows out; a first temperature sensor that detects the temperature of the fluid at a first position set in the smoothing passage; a second temperature sensor that detects the temperature of the fluid at a second position further downstream than the second outlet; a feed forward control unit that, based on detection data from the first temperature sensor, calculates an amount of temperature adjustment made by the temperature adjustment unit; and a feedback control unit that, based on detection data from the second temperature sensor, calculates an amount of temperature adjustment made by the temperature adjustment unit.

SELECTED DRAWING: Figure 1

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