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1. JP2020092130 - 搬送検知方法及び基板処理装置

Office Japan
Application Number 2018226866
Application Date 03.12.2018
Publication Number 2020092130
Publication Date 11.06.2020
Publication Kind A
IPC
H01L 21/68
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
68for positioning, orientation or alignment
B25J 13/08
BPERFORMING OPERATIONS; TRANSPORTING
25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; HANDLES FOR HAND IMPLEMENTS; WORKSHOP EQUIPMENT; MANIPULATORS
JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
13Controls for manipulators
08by means of sensing devices, e.g. viewing or touching devices
H01L 21/677
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
677for conveying, e.g. between different work stations
Applicants 東京エレクトロン株式会社
Inventors 高橋 明
河邊 篤
Agents 伊東 忠重
伊東 忠彦
Title
(JA) 搬送検知方法及び基板処理装置
Abstract
(JA)

【課題】複数の基板を複数段に搬送する基板処理装置において搬送状態を正しく検知する。
【解決手段】複数の基板保持部を有し、前記複数の基板保持部を用いて第1室と前記第1室に隣接する第2室との間にて複数の基板を複数段に搬送する搬送アームと、前記第1室と前記第2室とを連通する開口部の近傍に設けられた光センサと、を有する基板処理装置における搬送検知方法であって、前記開口部に平行な水平方向の光軸を持つ光を、前記複数の基板保持部に保持された基板が通過する位置に投光する工程と、前記光センサが投光した前記光を検知した結果に応じて、前記基板保持部の上の基板及び前記搬送アームの状態の少なくともいずれかを判定する工程と、を有する搬送検知方法が提供される。
【選択図】図2

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