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1. JP2020082170 - レーザ加工方法及びレーザ加工装置

Office Japan
Application Number 2018224091
Application Date 29.11.2018
Publication Number 2020082170
Publication Date 04.06.2020
Publication Kind A
IPC
B23K 26/067
BPERFORMING OPERATIONS; TRANSPORTING
23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
26Working by laser beam, e.g. welding, cutting or boring
02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
06Shaping the laser beam, e.g. by masks or multi-focusing
067Dividing the beam into multiple beams, e.g. multi-focusing
B23K 26/08
BPERFORMING OPERATIONS; TRANSPORTING
23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
26Working by laser beam, e.g. welding, cutting or boring
08Devices involving relative movement between laser beam and workpiece
B23K 26/382
BPERFORMING OPERATIONS; TRANSPORTING
23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
26Working by laser beam, e.g. welding, cutting or boring
36Removing material
38by boring or cutting
382by boring
B23K 26/386
BPERFORMING OPERATIONS; TRANSPORTING
23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
26Working by laser beam, e.g. welding, cutting or boring
36Removing material
38by boring or cutting
382by boring
386of blind holes
B23K 26/388
BPERFORMING OPERATIONS; TRANSPORTING
23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
26Working by laser beam, e.g. welding, cutting or boring
36Removing material
38by boring or cutting
382by boring
388Trepanning, i.e. boring by moving the beam spot about an axis
Applicants デクセリアルズ株式会社
Inventors 柴田 章広
小田桐 広和
土井 克浩
Agents 杉村 憲司
杉村 光嗣
柿沼 公二
吉澤 雄郎
Title
(JA) レーザ加工方法及びレーザ加工装置
Abstract
(JA)

【課題】レーザ加工を高速かつ高精度で行うことが可能なレーザ加工方法を提供する。
【解決手段】レーザ加工装置を用いて対象物を加工するレーザ加工方法であって、レーザ光を出射する工程と、対象物の加工面上において複数のレーザスポットが形成されるように前記レーザ光の位相を変調する工程と、位相が変調された前記レーザ光を前記加工面上に集光する工程と、前記複数のレーザスポットが前記加工面上においてトレパニング軌道を描くように、前記対物レンズと前記対象物とを相対移動させる工程と、を含み、前記相対移動させる工程は、前記トレパニング軌道の直径をDtとし、前記レーザスポットの直径をDIとしたときに、0<Dt/DI<100を満たすように前記対物レンズと前記対象物とを相対移動させる、レーザ加工方法。
【選択図】図1

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