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1. JP2019178942 - MICROPARTICLE ANALYZER, MICROPARTICLE ANALYSIS SYSTEM, AND CLEANING METHOD

Office
Japan
Application Number 2018068083
Application Date 30.03.2018
Publication Number 2019178942
Publication Date 17.10.2019
Publication Kind A
IPC
G01N 1/00
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
1Sampling; Preparing specimens for investigation
B01D 45/12
BPERFORMING OPERATIONS; TRANSPORTING
01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
DSEPARATION
45Separating dispersed particles from gases or vapours by gravity, inertia, or centrifugal forces
12by centrifugal forces
B04C 5/14
BPERFORMING OPERATIONS; TRANSPORTING
04CENTRIFUGAL APPARATUS OR MACHINES FOR CARRYING-OUT PHYSICAL OR CHEMICAL PROCESSES
CAPPARATUS USING FREE VORTEX FLOW, e.g. CYCLONES
5Apparatus in which the axial direction of the vortex is reversed
14Construction of the underflow ducting; Apex constructions; Discharge arrangements
B04C 5/20
BPERFORMING OPERATIONS; TRANSPORTING
04CENTRIFUGAL APPARATUS OR MACHINES FOR CARRYING-OUT PHYSICAL OR CHEMICAL PROCESSES
CAPPARATUS USING FREE VORTEX FLOW, e.g. CYCLONES
5Apparatus in which the axial direction of the vortex is reversed
20with heating or cooling, e.g. quenching, means
B04C 5/22
BPERFORMING OPERATIONS; TRANSPORTING
04CENTRIFUGAL APPARATUS OR MACHINES FOR CARRYING-OUT PHYSICAL OR CHEMICAL PROCESSES
CAPPARATUS USING FREE VORTEX FLOW, e.g. CYCLONES
5Apparatus in which the axial direction of the vortex is reversed
22with cleaning means
B04C 9/00
BPERFORMING OPERATIONS; TRANSPORTING
04CENTRIFUGAL APPARATUS OR MACHINES FOR CARRYING-OUT PHYSICAL OR CHEMICAL PROCESSES
CAPPARATUS USING FREE VORTEX FLOW, e.g. CYCLONES
9Combinations with other devices, e.g. fans
CPC
B01D 45/12
BPERFORMING OPERATIONS; TRANSPORTING
01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
DSEPARATION
45Separating dispersed particles from gases or vapours by gravity, inertia, or centrifugal forces
12by centrifugal forces
B04C 5/14
BPERFORMING OPERATIONS; TRANSPORTING
04CENTRIFUGAL APPARATUS OR MACHINES FOR CARRYING-OUT PHYSICAL OR CHEMICAL PROCESSES
CAPPARATUS USING FREE VORTEX FLOW, e.g. CYCLONES
5Apparatus in which the axial direction of the vortex is reversed
14Construction of the underflow ducting; Apex constructions; Discharge arrangements ; ; discharge through sidewall provided with a few slits or perforations
B04C 5/20
BPERFORMING OPERATIONS; TRANSPORTING
04CENTRIFUGAL APPARATUS OR MACHINES FOR CARRYING-OUT PHYSICAL OR CHEMICAL PROCESSES
CAPPARATUS USING FREE VORTEX FLOW, e.g. CYCLONES
5Apparatus in which the axial direction of the vortex is reversed
20with heating or cooling, e.g. quenching, means
B04C 5/22
BPERFORMING OPERATIONS; TRANSPORTING
04CENTRIFUGAL APPARATUS OR MACHINES FOR CARRYING-OUT PHYSICAL OR CHEMICAL PROCESSES
CAPPARATUS USING FREE VORTEX FLOW, e.g. CYCLONES
5Apparatus in which the axial direction of the vortex is reversed
22with cleaning means
B04C 9/00
BPERFORMING OPERATIONS; TRANSPORTING
04CENTRIFUGAL APPARATUS OR MACHINES FOR CARRYING-OUT PHYSICAL OR CHEMICAL PROCESSES
CAPPARATUS USING FREE VORTEX FLOW, e.g. CYCLONES
9Combinations with other devices, e.g. fans, ; expansion chambers, diffusors, water locks
G01N 1/00
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
1Sampling; Preparing specimens for investigation
Applicants HITACHI LTD
株式会社日立製作所
Inventors KUMANO SHUN
熊野 峻
NAGANO HISASHI
永野 久志
ITO TAKAHIRO
伊藤 孝広
MIZUNO HIROKI
水野 弘基
NOJIRI TATSUO
野尻 辰夫
SUGIYAMA MASUYUKI
杉山 益之
Agents 特許業務法人磯野国際特許商標事務所
Title
(EN) MICROPARTICLE ANALYZER, MICROPARTICLE ANALYSIS SYSTEM, AND CLEANING METHOD
(JA) 微粒子分析装置、微粒子分析システム及び洗浄方法
Abstract
(EN)

PROBLEM TO BE SOLVED: To clean the inside of a microparticle analyzer without stopping and disassembling the microparticle analyzer.

SOLUTION: The microparticle analyzer comprises: a cyclone dust collector 14; a primary filter 16 connected to the downstream of the cyclone dust collector 14 and heated; a gas analyzer 31 connected to the primary filter 16; a gas piping unit for connecting the cyclone dust collector 14 and the gas analyzer 31, in which the primary filter 16 is installed; and a cleaning gas introduction device 21 for introducing a cleaning gas into at least one of the downstream of the primary filter 16 in the gas piping unit and the cyclone dust collector 14. In a cleaning mode for cleaning at least the primary filter 16, the flow rate of a cleaning gas introduced from the cleaning gas introduction device 21 rises more than in an analysis mode in which analysis of microparticles by the gas analyzer 31 is carried out.

SELECTED DRAWING: Figure 1

COPYRIGHT: (C)2020,JPO&INPIT

(JA)

【課題】微粒子分析装置を停止・分解することなく微粒子分析装置の内部を洗浄することを課題とする。
【解決手段】サイクロン集塵装置14と、サイクロン集塵装置14の下流に接続され、加熱される1次フィルタ16と、1次フィルタ16と接続されているガス分析装置31と、サイクロン集塵装置14と、ガス分析装置31とを接続し、1次フィルタ16が設置されるガス配管部と、ガス配管部における1次フィルタ16の下流及びサイクロン集塵装置14の少なくとも一方に、洗浄ガスを導入する洗浄ガス導入装置21と、を有し、少なくとも1次フィルタ16を洗浄する洗浄モード時において、ガス分析装置31による微粒子の分析が行われる分析モード時よりも洗浄ガス導入装置21から導入される洗浄ガスの流量が上昇することを特徴とする。
【選択図】図1