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1. JP2019521948 - プロセスガスの送達のための方法、システム、および装置

Office Japan
Application Number 2019505137
Application Date 14.04.2017
Publication Number 2019521948
Publication Date 08.08.2019
Publication Kind A5
IPC
C01B 21/16
CCHEMISTRY; METALLURGY
01INORGANIC CHEMISTRY
BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF
21Nitrogen; Compounds thereof
082Compounds containing nitrogen and non-metals
16Hydrazine; Salts thereof
B01D 61/00
BPERFORMING OPERATIONS; TRANSPORTING
01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
DSEPARATION
61Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
C01B 15/01
CCHEMISTRY; METALLURGY
01INORGANIC CHEMISTRY
BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF
15Peroxides; Peroxyhydrates; Peroxyacids or salts thereof; Superoxides; Ozonides
01Hydrogen peroxide
H01L 21/027
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
02Manufacture or treatment of semiconductor devices or of parts thereof
027Making masks on semiconductor bodies for further photolithographic processing, not provided for in group H01L21/18 or H01L21/34165
CPC
B01B 1/005
BPERFORMING OPERATIONS; TRANSPORTING
01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
BBOILING; BOILING APPARATUS ; ; EVAPORATION; EVAPORATION APPARATUS
1Boiling; Boiling apparatus for physical or chemical purposes ; ; Evaporation in general
005Evaporation for physical or chemical purposes; Evaporation apparatus therefor, e.g. evaporation of liquids for gas phase reactions
B01D 63/02
BPERFORMING OPERATIONS; TRANSPORTING
01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
DSEPARATION
63Apparatus in general for separation processes using semi-permeable membranes
02Hollow fibre modules
B01D 69/02
BPERFORMING OPERATIONS; TRANSPORTING
01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
DSEPARATION
69Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor
02characterised by their properties
B01D 69/08
BPERFORMING OPERATIONS; TRANSPORTING
01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
DSEPARATION
69Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor
08Hollow fibre membranes
B01D 71/36
BPERFORMING OPERATIONS; TRANSPORTING
01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
DSEPARATION
71Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
06Organic material
30Polyalkenyl halides
32containing fluorine atoms
36Polytetrafluoroethene
B01D 2053/223
BPERFORMING OPERATIONS; TRANSPORTING
01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
DSEPARATION
53Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols,
22by diffusion
221Devices
223with hollow tubes
Applicants ラサーク インコーポレイテッド
Inventors アルバレス ジュニア ダニエル
ホームズ ラッセル ジェイ.
スピーゲルマン ジェフリー ジェイ.
ハインライン エドワード
ラモス クリストファー
トゥラメル エレミヤ
Agents 清水 初志
春名 雅夫
山口 裕孝
刑部 俊
井上 隆一
佐藤 利光
新見 浩一
小林 智彦
小寺 秀紀
大関 雅人
五十嵐 義弘
川本 和弥
Priority Data 62/323,697 16.04.2016 US
Title
(JA) プロセスガスの送達のための方法、システム、および装置
Abstract
(JA)

重要なプロセスまたは用途への高純度プロセスガスの蒸気相送達のための方法、システム、および装置が本明細書で提供される。