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1. JP2013542451 - 仮想参照面を備えた干渉計

Office Japan
Application Number 2013538897
Application Date 10.11.2011
Publication Number 2013542451
Publication Date 21.11.2013
Grant Number 5699221
Grant Date 20.02.2015
Publication Kind B2
IPC
G01B 9/02
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
9Instruments as specified in the subgroups and characterised by the use of optical measuring means
02Interferometers
G01B 11/24
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
11Measuring arrangements characterised by the use of optical means
24for measuring contours or curvatures
CPC
G01B 11/306
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
11Measuring arrangements characterised by the use of optical means
30for measuring roughness or irregularity of surfaces
306for measuring evenness
G01B 9/02015
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
9Instruments as specified in the subgroups and characterised by the use of optical measuring means
02Interferometers ; for determining dimensional properties of, or relations between, measurement objects
02015characterised by a particular beam path configuration
G01B 9/02072
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
9Instruments as specified in the subgroups and characterised by the use of optical measuring means
02Interferometers ; for determining dimensional properties of, or relations between, measurement objects
02055characterised by error reduction techniques
0207Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer
02072by calibration or testing of interferometer
G01B 9/0209
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
9Instruments as specified in the subgroups and characterised by the use of optical measuring means
02Interferometers ; for determining dimensional properties of, or relations between, measurement objects
0209Non-tomographic low coherence interferometers, e.g. low coherence interferometry, scanning white light interferometry, optical frequency domain interferometry or reflectometry
Applicants ザイゴ コーポレーション
Inventors フライシュラート、クラウス
Agents 恩田 誠
恩田 博宣
本田 淳
Priority Data 61/413,725 15.11.2010 US
61/414,160 16.11.2010 US
Title
(JA) 仮想参照面を備えた干渉計
Abstract
(JA)

撮像干渉計は、干渉計キャビティを画成する光学系を含み、光学系は、入力光を検査光と参照光とに分離するように配置された第1ビーム・スプリッティング光学部品と、検査光を検査面に透過し、検査面からの戻り検査光を受光し、その後、検査光を参照光と再合成するように配置された第2ビーム・スプリッティング光学部品と、第1光学部品から第2光学部品に参照光を導くように配置された第3光学部品とを含む。干渉計キャビティは、第2光学部品と第3光学部品との間の参照光の経路に沿って配置された仮想参照面を画成する。干渉計は、更に、再合成された検査光及び参照光を受光するように配置された撮像チャネルを含み、撮像チャネルは、撮像検出器と、検査面及び仮想参照面を検出器上に結像するように構成された少なくとも1つの撮像要素とを含む。

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