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1. JP2013518269 - 粒子線を受ける局所圧電力測定プローブのための電子制御及び増幅装置

Office
Japan
Application Number 2012550432
Application Date 27.01.2011
Publication Number 2013518269
Publication Date 20.05.2013
Publication Kind A
IPC
G01Q 30/02
GPHYSICS
01MEASURING; TESTING
QSCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING-PROBE MICROSCOPY
30Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
02Non-SPM analysing devices, e.g. SEM , spectrometer or optical microscope
G01Q 60/30
GPHYSICS
01MEASURING; TESTING
QSCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING-PROBE MICROSCOPY
60Particular types of SPM or apparatus therefor; Essential components thereof
24AFM or apparatus therefor, e.g. AFM probes
30Scanning potential microscopy
G01Q 60/50
GPHYSICS
01MEASURING; TESTING
QSCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING-PROBE MICROSCOPY
60Particular types of SPM or apparatus therefor; Essential components thereof
50MFM or apparatus therefor, e.g. MFM probes
CPC
G01Q 10/06
GPHYSICS
01MEASURING; TESTING
QSCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
10Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
04Fine scanning or positioning
06Circuits or algorithms therefor
G01Q 30/02
GPHYSICS
01MEASURING; TESTING
QSCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
30Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
02Non-SPM analysing devices, e.g. SEM [Scanning Electron Microscope], spectrometer or optical microscope
H01L 41/042
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
41Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
02Details
04of piezo-electric or electrostrictive devices
042Drive or control circuitry or methods for piezo-electric or electrostrictive devices not otherwise provided for
Applicants コミッサリア ア レネルジー アトミーク エ オ ゼネルジ ザルタナテイヴ
Inventors ジェローム・ポレゼル
Agents 村山 靖彦
志賀 正武
渡邊 隆
実広 信哉
Priority Data 1050633 29.01.2010 FR
Title
(JA) 粒子線を受ける局所圧電力測定プローブのための電子制御及び増幅装置
Abstract
(JA)

本発明は、圧電共振子(11)を有する局所プローブ、及びその信号の前置増幅と処理のための電子制御装置であって、このプローブが、前記プローブ(11)の方へ向けられた粒子線(12)を有する環境におけるサンプル(10)の物理的性質の局所測定のために設計されると共に、励起手段(15)によって生成された励起電圧が、第1のガルバニック絶縁変圧器(TR_1)を通して前記圧電共振子(11)に印加され、前記圧電共振子(11)の機械的な振動の測定に関する電流が、第2のガルバニック絶縁変圧器(TR_2)を通して、出力側の前置増幅手段(18)に印加される電子制御装置に関係する。


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