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1. JP2013079872 - SPECTRAL SENSOR

Office
Japan
Application Number 2011220180
Application Date 04.10.2011
Publication Number 2013079872
Publication Date 02.05.2013
Grant Number 5878723
Grant Date 05.02.2016
Publication Kind B2
IPC
G01J 3/26
GPHYSICS
01MEASURING; TESTING
JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
3Spectrometry; Spectrophotometry; Monochromators; Measuring colours
12Generating the spectrum; Monochromators
26using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filter
G01J 3/36
GPHYSICS
01MEASURING; TESTING
JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
3Spectrometry; Spectrophotometry; Monochromators; Measuring colours
28Investigating the spectrum
30Measuring the intensity of spectral lines directly on the spectrum itself
36Investigating two or more bands of a spectrum by separate detectors
CPC
G01J 3/26
GPHYSICS
01MEASURING; TESTING
JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
3Spectrometry; Spectrophotometry; Monochromators; Measuring colours
12Generating the spectrum; Monochromators
26using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
G01J 2003/1234
GPHYSICS
01MEASURING; TESTING
JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
3Spectrometry; Spectrophotometry; Monochromators; Measuring colours
12Generating the spectrum; Monochromators
1226Interference filters
1234Continuously variable IF [CVIF]; Wedge type
G01J 3/36
GPHYSICS
01MEASURING; TESTING
JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
3Spectrometry; Spectrophotometry; Monochromators; Measuring colours
28Investigating the spectrum
30Measuring the intensity of spectral lines directly on the spectrum itself
36Investigating two or more bands of a spectrum by separate detectors
G01J 3/513
GPHYSICS
01MEASURING; TESTING
JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
3Spectrometry; Spectrophotometry; Monochromators; Measuring colours
46Measurement of colour; Colour measuring devices, e.g. colorimeters
50using electric radiation detectors
51using colour filters
513having fixed filter-detector pairs
G01J 3/2803
GPHYSICS
01MEASURING; TESTING
JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
3Spectrometry; Spectrophotometry; Monochromators; Measuring colours
28Investigating the spectrum
2803using photoelectric array detector
G01J 2003/2806
GPHYSICS
01MEASURING; TESTING
JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
3Spectrometry; Spectrophotometry; Monochromators; Measuring colours
28Investigating the spectrum
2803using photoelectric array detector
2806Array and filter array
Applicants HAMAMATSU PHOTONICS KK
浜松ホトニクス株式会社
Inventors SHIBAYAMA KATSUMI
柴山 勝己
KASAHARA TAKASHI
笠原 隆
Agents 長谷川 芳樹
黒木 義樹
石田 悟
柴山 健一
Title
(EN) SPECTRAL SENSOR
(JA) 分光センサ
Abstract
(EN)

PROBLEM TO BE SOLVED: To provide a spectral sensor having a high reliability.

SOLUTION: A spectral sensor 1 comprises: an interference filter part 20 having a cavity layer 21 and first and second mirror layers 22, 23 facing each other via the cavity layer 21 and selectively transmitting light in a predetermined wavelength range according to an incident position; a light transmission substrate 3 being arranged on the side of the first mirror layer 22 and transmitting light incident to the interference filter part 20; and a light detection substrate 4 being arranged on the side of the second mirror layer 23 and detecting light having transmitted through the interference filter part 20. The cavity layer 21 includes: a filter region 24 sandwiched between the first and second mirror layers 22, 23; an annular enclosure region 25 enclosing the filter region 24 at a predetermined distance from the filter region 24; and an annular connection region 26 connecting an end part 24e, on the side of the light detection substrate 4, of the filter region 24 and an end part 25e, on the side of the light detection substrate 4, of the enclosure region 25.

COPYRIGHT: (C)2013,JPO&INPIT


(JA)

【課題】 信頼性の高い分光センサを提供する。
【解決手段】 分光センサ1は、キャビティ層21並びにキャビティ層21を介して対向する第1及び第2のミラー層22,23を有し、所定の波長範囲の光を入射位置に応じて選択的に透過させる干渉フィルタ部20と、第1のミラー層22側に配置され、干渉フィルタ部20に入射する光を透過させる光透過基板3と、第2のミラー層23側に配置され、干渉フィルタ部20を透過した光を検出する光検出基板4と、を備える。キャビティ層21は、第1及び第2のミラー層22,23によって挟まれたフィルタ領域24と、フィルタ領域24から所定の距離をとってフィルタ領域24を包囲する環状の包囲領域25と、フィルタ領域24の光検出基板4側の端部24eと包囲領域25の光検出基板4側の端部25eとを接続する環状の接続領域26と、を有する。
【選択図】 図1


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