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1. JP2009507656 - マイクロシステムの製造方法、当該マイクロシステム、当該マクロシステムを有するホイルの積層体、当該マイクロシステムを有するエレクトロニクス素子、及び該エレクトロニクス素子の使用

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Office
Japan
Application Number 2008529720
Application Date 24.08.2006
Publication Number 2009507656
Publication Date 26.02.2009
Publication Kind A
IPC
B81C 3/00
BPERFORMING OPERATIONS; TRANSPORTING
81MICROSTRUCTURAL TECHNOLOGY
CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
3Assembling of devices or systems from individually processed components
B81B 3/00
BPERFORMING OPERATIONS; TRANSPORTING
81MICROSTRUCTURAL TECHNOLOGY
BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
3Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
G01P 15/125
GPHYSICS
01MEASURING; TESTING
PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION OR SHOCK; INDICATING PRESENCE OR ABSENCE OF MOVEMENT;  INDICATING DIRECTION OF MOVEMENT 
15Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
02by making use of inertia forces
08with conversion into electric or magnetic values
125by capacitive pick-up
H04R 19/04
HELECTRICITY
04ELECTRIC COMMUNICATION TECHNIQUE
RLOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
19Electrostatic transducers
04Microphones
CPC
B01L 3/5027
BPERFORMING OPERATIONS; TRANSPORTING
01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
3Containers or dishes for laboratory use, e.g. laboratory glassware
50Containers for the purpose of retaining a material to be analysed, e.g. test tubes
502with fluid transport, e.g. in multi-compartment structures
5027by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
B01L 3/502707
BPERFORMING OPERATIONS; TRANSPORTING
01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
3Containers or dishes for laboratory use, e.g. laboratory glassware
50Containers for the purpose of retaining a material to be analysed, e.g. test tubes
502with fluid transport, e.g. in multi-compartment structures
5027by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
502707characterised by the manufacture of the container or its components
B01L 3/50273
BPERFORMING OPERATIONS; TRANSPORTING
01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
3Containers or dishes for laboratory use, e.g. laboratory glassware
50Containers for the purpose of retaining a material to be analysed, e.g. test tubes
502with fluid transport, e.g. in multi-compartment structures
5027by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
50273characterised by the means or forces applied to move the fluids
B01L 3/502738
BPERFORMING OPERATIONS; TRANSPORTING
01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
3Containers or dishes for laboratory use, e.g. laboratory glassware
50Containers for the purpose of retaining a material to be analysed, e.g. test tubes
502with fluid transport, e.g. in multi-compartment structures
5027by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
502738characterised by integrated valves
B01L 2200/10
BPERFORMING OPERATIONS; TRANSPORTING
01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
2200Solutions for specific problems relating to chemical or physical laboratory apparatus
10Integrating sample preparation and analysis in single entity, e.g. lab-on-a-chip concept
B01L 2200/12
BPERFORMING OPERATIONS; TRANSPORTING
01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
2200Solutions for specific problems relating to chemical or physical laboratory apparatus
12Specific details about manufacturing devices
Applicants コーニンクレッカ　フィリップス　エヌ　ヴェ
Inventors ランヘレイス，ヘールト
ウェーカンプ，ヨハネス　ウィルヘスミュス
ヒースベルス，ヤコビュス　ベルナルデュス
Agents 伊東　忠彦
大貫　進介
伊東　忠重
Priority Data 05108280.8 09.09.2005 EP
Title
(JA) マイクロシステムの製造方法、当該マイクロシステム、当該マクロシステムを有するホイルの積層体、当該マイクロシステムを有するエレクトロニクス素子、及び該エレクトロニクス素子の使用
front page image
Abstract
(JA)

本発明は、マイクロシステムの製造方法に関し、さらには当該マイクロシステムにも関する。この方法によって、マイクロシステムは、少なくとも1面上に導電性層(11a,11b)を有する前処理がされた処理ホイル(10)を積層することによって製造されて良い。積層後、ホイル(10)は、圧力及び熱を用いることによって密閉される。最終的には、マイクロシステムは積層体(S)から分離される。ホイルの前処理（レーザービームの手段によって行われることが好ましい）は、次の、(A)ホイルをそのままにしておく工程、(B)導電性層を除去する工程、(C) 導電性層を除去し、かつホイル(10)を部分的に蒸発させる工程、及び(D)ホイル(10)だけではなく導電性層をも除去することでホイル(10)内に穴を作る工程、を選択する。前記の積層と併用することによって、空洞、自由に浮くカンチレバー、及び膜を作製することが可能となる。これによって、MEMS素子及びマイクロ流体システムのような様々なマイクロシステムを製造する可能性が開かれる。
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