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1. JP2002164416 - APPARATUS FOR DETECTING OBJECT AND PROCESSING SYSTEM USING IT

Office
Japan
Application Number 2001275709
Application Date 11.09.2001
Publication Number 2002164416
Publication Date 07.06.2002
Publication Kind A
IPC
H01L 21/68
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
68for positioning, orientation or alignment
B65G 1/00
BPERFORMING OPERATIONS; TRANSPORTING
65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
1Storing articles, individually or in orderly arrangement, in warehouses or magazines
G01V 8/14
GPHYSICS
01MEASURING; TESTING
VGEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
8Prospecting or detecting by optical means
10Detecting, e.g. by using light barriers
12using one transmitter and one receiver
14using reflectors
Applicants TOKYO ELECTRON LTD
東京エレクトロン株式会社
Inventors TAKAHASHI MIKIO
高橋 幹生
Agents 浅井 章弘
Priority Data 2000278311 13.09.2000 JP
Title
(EN) APPARATUS FOR DETECTING OBJECT AND PROCESSING SYSTEM USING IT
(JA) 被検出体の検出装置とこれを用いた処理システム
Abstract
(EN)

PROBLEM TO BE SOLVED: To provide an apparatus for detecting an object where its presence can be certainly recognized regardless of its surface state.

SOLUTION: The apparatus 20 for detecting an object 26 comprises a light emitting element 4 for emitting light L1, a light receiving element 6 for receiving the reflected light L2 of the detection light, and a reflector 22 arranged via the detection space of the object for the light emitting device and has a reflecting surface reflecting the light mainly in the incidence direction of the light, the incidence direction of the detection light with respect to this reflecting surface being inclined by a predetermined angle in the normal line direction of the reflecting surface 22A. As a result, this presence can be certainly recognized regardless of the surface state of the object.

COPYRIGHT: (C)2002,JPO

(JA)


【課題】 被検出体の表面状態に関係なくこの有無を確
実に認識することができる被検出体の検出装置を提供す
る。


【解決手段】 被検出体26の検出装置20において、
検出光L1を射出する発光素子4と、前記検出光の反射
光L2を受光する受光素子6と、前記発光素子に対して
被検出体の検出空間を介して配置されると共に、主とし
て光の入射方向に光を反射する反射面を有し、この反射
面に対する前記検出光の入射方向が、前記反射面22A
の法線方向よりも所定の角度だけ傾斜された反射体22
と、を備える。
これにより、被検出体の表面状態に関係
なくこの有無を確実に認識することが可能となる。

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