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1. IN6079/CHENP/2007 - A METHOD OF MANUFACTURING A MEMS ELEMENT

Office
India
Application Number 6079/CHENP/2007
Application Date 31.12.2007
Publication Number 6079/CHENP/2007
Publication Date 31.08.2016
Publication Kind A
IPC
B81C 1/00
BPERFORMING OPERATIONS; TRANSPORTING
81MICROSTRUCTURAL TECHNOLOGY
CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
1Manufacture or treatment of devices or systems in or on a substrate
Applicants KONINKLIJKE PHILIPS ELECTRONICS N.V.
Inventors DEKKER, RONALD,
LANGEREIS, GEERT,
POHLMANN, HAUKE,
DUEMLING, MARTIN,
Priority Data 05105869.1 30.06.2005 EP
Title
(EN) A METHOD OF MANUFACTURING A MEMS ELEMENT
Abstract
(EN) ABSTRACTThe device (100) comprises a substrate (10) of a semiconductor material with a first and an opposite second surface (1,2) and a microelectromechanical (MEMS) element (50) which is provided with a fixed and a movable electrode (52, 51) that is present in a cavity (30). One of the electrodes (51,52) is defined in the substrate (10). The movable electrode (51) is movable towards and from the fixed electrode (52) between a first gapped position and a second position. The cavity (30) is opened through holes (18) in the substrate (10) that are exposed on the second surface (2) of the substrate (10). The cavity (30) has a height that is defined by at least one post (15) in .the substrate (10), which laterally substantially surrounds the cavity (15).