Processing

Please wait...

Settings

Settings

Goto Application

1. IN8120/DELNP/2009 - MEMS DEVICES HAVING IMPROVED UNIFORMITY AND METHODS FOR MAKING THEM

Office
India
Application Number 8120/DELNP/2009
Application Date 11.12.2009
Publication Number 8120/DELNP/2009
Publication Date 09.07.2010
Publication Kind A
IPC
G02B 26/08
GPHYSICS
02OPTICS
BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
26Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating or modulating
08for controlling the direction of light
Applicants QUALCOMM MEMS TECHNOLOGIES, INC,
Inventors HEALD DAVID, L.
ZHONG FAN
FLOYD PHILIP DON
Title
(EN) MEMS DEVICES HAVING IMPROVED UNIFORMITY AND METHODS FOR MAKING THEM
Abstract
(EN)
Disclosed is a microelectromechanical system (MEMS) device and method of manufacturing the same. In one aspect, MEMS such as an interferometric modulator include one or more elongated interior posts and support rails supporting a deformable reflective layer, where the elongated interior posts are entirely within an interferometric cavity and aligned parallel with the support rails. In another aspect, the interferometric modulator includes one or more elongated etch release holes formed in the deformable reflective layer and aligned parallel with channels formed in the deformable reflective layer defining parallel strips of the deformable reflective layer.