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1. FR3056015 - PROCEDE DE DOPAGE PAR L'AZOTE DE MATERIAUX SOLIDES

Office France
Application Number 1658615
Application Date 15.09.2016
Publication Number 3056015
Publication Date 16.03.2018
Grant Number 3056015
Grant Date 12.10.2018
Publication Kind B1
IPC
H01L 21/22
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
02Manufacture or treatment of semiconductor devices or of parts thereof
04the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer, carrier concentration layer
18the devices having semiconductor bodies comprising elements of group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
22Diffusion of impurity materials, e.g. doping materials, electrode materials, into, or out of, a semiconductor body, or between semiconductor regions; Redistribution of impurity materials, e.g. without introduction or removal of further dopant
C01B 32/05
CCHEMISTRY; METALLURGY
01INORGANIC CHEMISTRY
BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF
32Carbon; Compounds thereof
05Preparation or purification of carbon not covered by groups C01B32/15, C01B32/20, C01B32/25, C01B32/30178
CPC
C01B 32/152
CCHEMISTRY; METALLURGY
01INORGANIC CHEMISTRY
BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; ; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
32Carbon; Compounds thereof
15Nano-sized carbon materials
152Fullerenes
C01B 32/168
CCHEMISTRY; METALLURGY
01INORGANIC CHEMISTRY
BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; ; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
32Carbon; Compounds thereof
15Nano-sized carbon materials
158Carbon nanotubes
168After-treatment
C01B 32/194
CCHEMISTRY; METALLURGY
01INORGANIC CHEMISTRY
BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; ; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
32Carbon; Compounds thereof
15Nano-sized carbon materials
182Graphene
194After-treatment
C01B 32/20
CCHEMISTRY; METALLURGY
01INORGANIC CHEMISTRY
BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; ; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
32Carbon; Compounds thereof
20Graphite
C01B 32/156
CCHEMISTRY; METALLURGY
01INORGANIC CHEMISTRY
BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; ; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
32Carbon; Compounds thereof
15Nano-sized carbon materials
152Fullerenes
156After-treatment
C01B 32/21
CCHEMISTRY; METALLURGY
01INORGANIC CHEMISTRY
BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; ; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
32Carbon; Compounds thereof
20Graphite
21After-treatment
Applicants ECOLE POLYTECH
COMMISSARIAT ENERGIE ATOMIQUE
CENTRE NAT RECH SCIENT
Inventors CORBEL CATHERINE MYRIAM HELENE
SHCHEDRINA IRINA
RENAULT JEAN-PHILIPPE JACQUES
Priority Data 1658615 15.09.2016 FR
Title
(FR) PROCEDE DE DOPAGE PAR L'AZOTE DE MATERIAUX SOLIDES
Abstract
(FR)
L'invention concerne un procédé de dopage à l'azote d'un matériau comprenant ou constitué d'un ensemble d'atomes de carbone à l'état d'hybridation sp2, ledit procédé comprenant les étapes suivantes : a) la mise en contact dudit matériau avec du diazote b) l'irradiation du matériau et du diazote mis en contact par un faisceau d'électrons ou d'ions légers dont l'énergie est supérieure ou égale à 0,1 MeV, pour obtenir un matériau dont tout ou partie de l'ensemble d'atomes de carbone à l'état d'hybridation sp2 est dopé à l'azote ; le matériau n'étant pas oxydé préalablement à l'étape a).