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1. (EP2675936) DEVICE FOR SYNTHESISING A NANOSTRUCTURED COMPOSITE MATERIAL, AND ASSOCIATED METHOD

Office : European Patent Office
Application Number: 12705440 Application Date: 07.02.2012
Publication Number: 2675936 Publication Date: 25.12.2013
Publication Kind : B1
Designated States: AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR
Prior PCT appl.: Application Number:IB2012050549 ; Publication Number: Click to see the data
IPC:
C23C 14/22
H01J 37/301
H01J 37/317
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22
characterised by the process of coating
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37
Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
30
Electron-beam or ion-beam tubes for localised treatment of objects
301
Arrangements enabling beams to pass between regions of different pressure
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37
Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
30
Electron-beam or ion-beam tubes for localised treatment of objects
317
for changing properties of the objects or for applying thin layers thereon, e.g. ion implantation
CPC:
C23C 14/228
C23C 14/22
H01J 37/301
H01J 37/317
H01J 37/3178
Applicants: COMMISSARIAT L ÉNERGIE ATOMIQUE ET AUX ÉNERGIES ALTERNATIVES
Inventors: LECONTE YANN
PAQUEZ XAVIER
SUBLEMONTIER OLIVIER
Priority Data: 1100447 14.02.2011 FR
2012050549 07.02.2012 IB
Title: (DE) VORRICHTUNG ZUR SYNTHETISIERUNG EINES NANOSTRUKTURIERTEN VERBUNDMATERIALS UND ZUGEHÖRIGES VERFAHREN
(EN) DEVICE FOR SYNTHESISING A NANOSTRUCTURED COMPOSITE MATERIAL, AND ASSOCIATED METHOD
(FR) DISPOSITIF DE SYNTHESE D'UN MATERIAU COMPOSITE NANOSTRUCTURE ET PROCEDE ASSOCIE
Abstract:
(EN) The present invention relates to a device for synthesising a nanostructured composite material and to an associated method. The device includes a chamber (3) for synthesising said material, comprising a system (13) for depositing the matrix onto a target surface (15), a system (1, 4, 5, 9) for generating a supersonic jet of nanoparticles in a carrier gas, said system comprising an expansion chamber (1) and a buffer chamber (2) arranged between said system (1, 4, 5, 9) for generating said supersonic jet and the synthesis chamber (3), the prevailing pressure inside the buffer chamber (2) being lower than the prevailing pressure inside the expansion chamber (1), said supersonic jet of carrier gas driving the nanoparticles which are to thereby pass through the expansion chamber (1) and then through the buffer chamber (2), such that the nanoparticles pass through the synthesis chamber (3) onto the target surface (15).
(FR) La présente invention concerne un dispositif de synthèse d'un matériau composite nanostructuré et un procédé associé. Le dispositif comprend une chambre de synthèse (3) dudit matériau comportant un système (13) de dépôt de la matrice sur une surface cible (15), un système (1, 4, 5, 9) pour générer un jet supersonique de nanoparticules dans un gaz porteur, ledit système comportant une chambre de détente (1 ) et une chambre tampon (2) disposée entre ledit système (1, 4, 5, 9) pour générer ce jet supersonique et la chambre de synthèse (3), la pression régnant dans la chambre tampon (2) étant inférieure à la pression régnant dans la chambre de détente (1 ), ledit jet supersonique de gaz porteur entraînant les nanoparticules étant ainsi destiné à traverser la chambre de détente (1 ) puis la chambre tampon (2), de sorte que les nanoparticules traversent la chambre de synthèse (3) jusqu'à la surface cible (15).
Also published as:
WO/2012/110914