Processing

Please wait...

Settings

Settings

Goto Application

1. EP2641054 - INTERFEROMETER WITH A VIRTUAL REFERENCE SURFACE

Office European Patent Office
Application Number 11842057
Application Date 10.11.2011
Publication Number 2641054
Publication Date 25.09.2013
Publication Kind A2
IPC
G01B 9/02
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
9Instruments as specified in the subgroups and characterised by the use of optical measuring means
02Interferometers
G01B 11/30
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
11Measuring arrangements characterised by the use of optical means
30for measuring roughness or irregularity of surfaces
CPC
G01B 11/306
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
11Measuring arrangements characterised by the use of optical means
30for measuring roughness or irregularity of surfaces
306for measuring evenness
G01B 9/02015
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
9Instruments as specified in the subgroups and characterised by the use of optical measuring means
02Interferometers ; for determining dimensional properties of, or relations between, measurement objects
02015characterised by a particular beam path configuration
G01B 9/02072
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
9Instruments as specified in the subgroups and characterised by the use of optical measuring means
02Interferometers ; for determining dimensional properties of, or relations between, measurement objects
02055characterised by error reduction techniques
0207Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer
02072by calibration or testing of interferometer
G01B 9/0209
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
9Instruments as specified in the subgroups and characterised by the use of optical measuring means
02Interferometers ; for determining dimensional properties of, or relations between, measurement objects
0209Non-tomographic low coherence interferometers, e.g. low coherence interferometry, scanning white light interferometry, optical frequency domain interferometry or reflectometry
Applicants ZYGO CORP
Inventors FREISCHLAD KLAUS
Designated States
Priority Data 2011060222 10.11.2011 US
41372510 15.11.2010 US
41416010 16.11.2010 US
Title
(DE) INTERFEROMETER MIT VIRTUELLER REFERENZOBERFLÄCHE
(EN) INTERFEROMETER WITH A VIRTUAL REFERENCE SURFACE
(FR) INTERFÉROMÈTRE POSSÉDANT UNE SURFACE DE RÉFÉRENCE VIRTUELLE
Abstract
(EN)
An imaging interferometer includes optics defining an interferometric cavity, in which the optics include a first beam-splitting optic positioned to separate an input beam into a test beam and a reference beam, a second beam-splitting optic positioned to transmit the test beam to the test surface, receive the test beam back from the test surface, and thereafter recombine the test beam with the reference beam, and a third optic positioned to direct the reference beam from the first optic to the second optic. The interferometric cavity defines a virtual reference surface positioned along a path for the reference beam between the second and third optics. The interferometer also includes an imaging channel positioned to receive the recombined test and reference beams, where the imaging channel includes an imaging detector, and at least one imaging element configured to image the test surface and the virtual reference surface onto the detector.

(FR)
La présente invention concerne un interféromètre d'imagerie qui comprend des optiques qui définissent une cavité interférométrique. Les optiques comprennent un premier optique de séparation de faisceau positionné pour séparer un faisceau d'entrée en un faisceau d'essai et un faisceau de référence, un deuxième optique de séparation de faisceau positionné pour transmettre le faisceau d'essai à la surface d'essai, pour recevoir le faisceau d'essai qui revient de la surface d'essai, et pour ensuite recombiner le faisceau d'essai avec le faisceau de référence, et un troisième optique positionné pour diriger le faisceau de référence du premier optique au deuxième optique. La cavité interférométrique définit une surface de référence virtuelle positionnée le long d'un trajet pour le faisceau de référence entre les deuxième et troisième optiques. L'interféromètre comprend également un canal d'imagerie positionné pour recevoir les faisceaux d'essai et de référence recombinés, le canal d'imagerie comprenant un détecteur d'imagerie, et au moins un élément d'imagerie conçu pour imager la surface d'essai et la surface de référence virtuelle sur le détecteur.

Also published as