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1. EP2634530 - SHAPE MEASURING DEVICE, SHAPE MEASURING METHOD, STRUCTURE MANUFACTURING METHOD, AND PROGRAM

Office European Patent Office
Application Number 11836416
Application Date 27.10.2011
Publication Number 2634530
Publication Date 04.09.2013
Publication Kind A4
IPC
G01B 21/20
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
21Measuring arrangements or details thereof in so far as they are not adapted to particular types of measuring means of the other groups of this subclass
20for measuring contours or curvatures, e.g. determining profile
G01B 5/008
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
5Measuring arrangements characterised by the use of mechanical means
004for measuring coordinates of points
008using coordinate measuring machines
G01B 11/24
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
11Measuring arrangements characterised by the use of optical means
24for measuring contours or curvatures
G01B 21/04
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
21Measuring arrangements or details thereof in so far as they are not adapted to particular types of measuring means of the other groups of this subclass
02for measuring length, width, or thickness
04by measuring coordinates of points
CPC
G01B 11/24
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
11Measuring arrangements characterised by the use of optical means
24for measuring contours or curvatures
G01B 21/20
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
21Measuring arrangements or details thereof in so far as they are not adapted to particular types of measuring means of the preceding groups
20for measuring contours or curvatures, e.g. determining profile
Y10T 29/49718
YSECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
10TECHNICAL SUBJECTS COVERED BY FORMER USPC
TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
29Metal working
49Method of mechanical manufacture
49718Repairing
Y10T 29/49771
YSECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
10TECHNICAL SUBJECTS COVERED BY FORMER USPC
TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
29Metal working
49Method of mechanical manufacture
49764with testing or indicating
49771Quantitative measuring or gauging
G01B 5/008
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
5Measuring arrangements characterised by the use of mechanical means
004for measuring coordinates of points
008using coordinate measuring machines
G01B 21/04
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
21Measuring arrangements or details thereof in so far as they are not adapted to particular types of measuring means of the preceding groups
02for measuring length, width, or thickness
04by measuring coordinates of points
Applicants NIKON CORP
Inventors KANTO KENTA
Designated States
Priority Data 2010241340 27.10.2010 JP
2011074854 27.10.2011 JP
Title
(DE) FORMMESSVORRICHTUNG, FORMMESSVERFAHREN SOWIE STRUKTURHERSTELLUNGSVERFAHREN UND -PROGRAMM
(EN) SHAPE MEASURING DEVICE, SHAPE MEASURING METHOD, STRUCTURE MANUFACTURING METHOD, AND PROGRAM
(FR) DISPOSITIF DE MESURE DE FORME, PROCÉDÉ DE MESURE DE FORME, PROCÉDÉ DE FABRICATION DE STRUCTURE ET PROGRAMME
Abstract
(EN)
To simplify setting processing (teaching processing) of setting a measurement area to be measured with respect to an object to be inspected. A form measuring apparatus is provided with: a detecting section (20) which performs detection of a surface form of a surface of an object having a three-dimensional form; and an area-setting section (58) which sets, as a measurement area, an adjacent area adjacent to a predetermined designated area, based on a form measurement data of the form detected in the predetermined designated area.

(FR)
L'invention a pour but de simplifier le traitement de définition (procédé d'apprentissage) d'une région à mesurer par rapport à un sujet à inspecter. L'invention concerne un dispositif de mesure de forme qui comprend : une unité de détection (20) détectant la forme de la surface d'un objet à inspecter, ledit objet ayant une forme tridimensionnelle; et une unité de définition de région (58) qui définit, sur la base de données de mesure de la forme détectée dans une région prédéterminée spécifiée, une région adjacente à la région déterminée en tant que région à mesurer.

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