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1. EP2529239 - ELECTRONIC CONTROL AND AMPLIFICATION DEVICE FOR A PIEZOELECTRIC LOCAL PROBE FOR MEASURING FORCE BENEATH A PARTICLE BEAM

Office
European Patent Office
Application Number 11700855
Application Date 27.01.2011
Publication Number 2529239
Publication Date 05.12.2012
Publication Kind B1
IPC
G01Q 30/02
GPHYSICS
01MEASURING; TESTING
QSCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING-PROBE MICROSCOPY
30Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
02Non-SPM analysing devices, e.g. SEM , spectrometer or optical microscope
G01Q 10/06
GPHYSICS
01MEASURING; TESTING
QSCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING-PROBE MICROSCOPY
10Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
04Fine scanning or positioning
06Circuits or algorithms therefor
H01L 41/04
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
41Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
02Details
04of piezo-electric or electrostrictive elements
CPC
G01Q 10/06
GPHYSICS
01MEASURING; TESTING
QSCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
10Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
04Fine scanning or positioning
06Circuits or algorithms therefor
G01Q 30/02
GPHYSICS
01MEASURING; TESTING
QSCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
30Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
02Non-SPM analysing devices, e.g. SEM [Scanning Electron Microscope], spectrometer or optical microscope
H01L 41/042
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
41Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
02Details
04of piezo-electric or electrostrictive devices
042Drive or control circuitry or methods for piezo-electric or electrostrictive devices not otherwise provided for
Applicants COMMISSARIAT L ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
Inventors POLESEL JÉRÔME
Designated States
Priority Data 1050633 29.01.2010 FR
Title
(DE) ELEKTRONISCHE STEUERUNG UND VERSTÄRKUNGSVORRICHTUNG FÜR EINE LOKALE PIEZOELEKTRISCHE SONDE ZUR MESSUNG DER KRAFT UNTER EINEM PARTIKELSTRAHL
(EN) ELECTRONIC CONTROL AND AMPLIFICATION DEVICE FOR A PIEZOELECTRIC LOCAL PROBE FOR MEASURING FORCE BENEATH A PARTICLE BEAM
(FR) DISPOSITIF ELECTRONIQUE DE PILOTAGE ET D'AMPLIFICATION POUR UNE SONDE LOCALE PIEZOELECTRIQUE DE MESURE DE FORCE SOUS UN FAISCEAU DE PARTICULES
Abstract
(EN) The invention relates to an electronic control device for controlling a piezoelectric resonator local probe (11) and for preamplifying and processing the signals thereof, said probe being intended for locally measuring physical properties of a sample (10) in an environment having a particle beam (12) directed towards the probe (11), wherein an excitation voltage generated by the excitation means (15) is applied to the piezoelectric resonator (11) via a first galvanic isolation transformer (TR­_1), and wherein a current for measuring the mechanical oscillations of the piezoelectric resonator (11) is applied, via a second galvanic isolation transformer (TR_2), to preamplification means (18) situated downstream.
(FR) L'invention concerne un dispositif électronique de pilotage d'une sonde locale à résonateur piézoélectrique (11) et de préamplification et traitement de ses signaux, cette sonde étant destinée à la mesure locale de propriétés physiques d'un échantillon (10) dans un environnement présentant un faisceau de particules (12) dirigé vers la sonde (11), dans lequel une tension d'excitation générée par les moyens d'excitation (15) est appliquée au résonateur piézoélectrique (11) via un premier transformateur d'isolation galvanique (TR_1), et dans lequel un courant de mesure des oscillations mécaniques du résonateur piézoélectrique (11) est appliqué via un second transformateur d'isolation galvanique (TR_2) à des moyens de préamplification (18) situés en aval.