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1. EP3663775 - SCANNING PROBE MICROSCOPE, SCAN HEAD AND METHOD

Office European Patent Office
Application Number 18210229
Application Date 04.12.2018
Publication Number 3663775
Publication Date 10.06.2020
Publication Kind A1
IPC
G01Q 10/04
GPHYSICS
01MEASURING; TESTING
QSCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING-PROBE MICROSCOPY
10Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
04Fine scanning or positioning
CPC
G01Q 10/045
GPHYSICS
01MEASURING; TESTING
QSCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
10Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
04Fine scanning or positioning
045Self-actuating probes, i.e. wherein the actuating means for driving are part of the probe itself, e.g. piezoelectric means on a cantilever probe
G01Q 20/04
GPHYSICS
01MEASURING; TESTING
QSCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
20Monitoring the movement or position of the probe
04Self-detecting probes, i.e. wherein the probe itself generates a signal representative of its position, e.g. piezo-electric gauge
G01Q 30/10
GPHYSICS
01MEASURING; TESTING
QSCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
30Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
08Means for establishing or regulating a desired environmental condition within a sample chamber
10Thermal environment
G01Q 70/04
GPHYSICS
01MEASURING; TESTING
QSCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
70General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
02Probe holders
04with compensation for temperature or vibration induced errors
Applicants TNO
Inventors HERFST ROELOF WILLEM
SADEGHIAN MARNANI HAMED
Designated States
Priority Data 18210229 04.12.2018 EP
Title
(DE) RASTERSONDENMIKROSKOP, RASTERKOPF UND VERFAHREN
(EN) SCANNING PROBE MICROSCOPE, SCAN HEAD AND METHOD
(FR) MICROSCOPE À SONDE DE BALAYAGE, TÊTE DE BALAYAGE ET PROCÉDÉ
Abstract
(EN)
The present invention relates to a scan head for a scanning probe microscope arranged for moving a probe including a conductive cantilever relatively to a substrate surface, the head comprising: a first electrode positioned such that a capacitor is formed across a gap between the first electrode and a second electrode, wherein the second electrode is formed by the conductive cantilever; a voltage source for actuating the conductive cantilever by applying a voltage to the capacitor; and at least a first resistor arranged in series between the voltage source and one of the first and second electrodes such as to form an RC circuit for damping a vibration of the cantilever.

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