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1. (EP2314734) Method of producing porous metal oxide films using template assisted electrostatic spray deposition

Office : European Patent Office
Application Number: 09173505 Application Date: 20.10.2009
Publication Number: 2314734 Publication Date: 27.04.2011
Publication Kind : A1
IPC:
C23C 18/12
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
18
Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
02
by thermal decomposition
12
characterised by the deposition of inorganic material other than metallic material
CPC:
C23C 18/1216
C23C 18/1241
C23C 18/1254
C23C 18/1279
C23C 18/1283
Y10T 428/24997
Applicants: UNIV BERLIN TECH
Inventors: PAUL BENJAMIN
SOKOLOV SERGEY
KRAEHNERT RALPH
Priority Data: 09173505 20.10.2009 EP
Title: (DE) Verfahren zur Herstellung poröser Metalloxidfilmen mittels vorlagenunterstützter elektrostatischer Sprayablagerung
(EN) Method of producing porous metal oxide films using template assisted electrostatic spray deposition
(FR) Procédé de production de films à oxyde métallique poreux utilisant un dépôt de pulvérisation électrostatique assisté
Abstract: front page image
(EN) The present invention relates to a method of producing porous metal oxide films on a substrate using template assisted electrostatic spray deposition (ESD). Thereby it is possible to produce both mesoporous and macroporous films which have a predefined pore morphology. In addition hierarchically structured meso- and macroporous films can be produced. The present invention also concerns the produced porous films and their use in catalysis, power storage, sensing and compound separation.