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1. EP3068725 - METHOD FOR CONTINUOUS, TRAVELLING PRODUCTION OF NANOSTRUCTURES ALIGNED ON A SUBSTRATE AND RELATED DEVICE

Office European Patent Office
Application Number 14802369
Application Date 14.11.2014
Publication Number 3068725
Publication Date 21.09.2016
Publication Kind A1
IPC
C01B 31/02
CCHEMISTRY; METALLURGY
01INORGANIC CHEMISTRY
BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF
31Carbon; Compounds thereof
02Preparation of carbon; Purification
B01J 19/22
BPERFORMING OPERATIONS; TRANSPORTING
01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
19Chemical, physical or physico-chemical processes in general; Their relevant apparatus
18Stationary reactors having moving elements inside
22in the form of endless belts
CPC
C23C 16/455
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
16Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
44characterised by the method of coating
455characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
B01J 4/002
BPERFORMING OPERATIONS; TRANSPORTING
01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
4Feed ; or outlet; devices; Feed or outlet control devices
001Feed or outlet devices as such, e.g. feeding tubes
002Nozzle-type elements
B01J 19/1862
BPERFORMING OPERATIONS; TRANSPORTING
01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
19Chemical, physical or physico-chemical processes in general; Their relevant apparatus
18Stationary reactors having moving elements inside
1862placed in series
B01J 19/22
BPERFORMING OPERATIONS; TRANSPORTING
01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
19Chemical, physical or physico-chemical processes in general; Their relevant apparatus
18Stationary reactors having moving elements inside
22in the form of endless belts
B01J 31/2295
BPERFORMING OPERATIONS; TRANSPORTING
01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
31Catalysts comprising hydrides, coordination complexes or organic compounds
16containing coordination complexes
22Organic complexes
2282Unsaturated compounds used as ligands
2295Cyclic compounds, e.g. cyclopentadienyls
B01J 2219/00159
BPERFORMING OPERATIONS; TRANSPORTING
01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
2219Chemical, physical or physico-chemical processes in general; Their relevant apparatus
00049Controlling or regulating processes
00051Controlling the temperature
00159controlling multiple zones along the direction of flow, e.g. pre-heating and after-cooling
Applicants COMMISSARIAT À L ÉNERGIE ATOMIQUE ET AUX ÉNERGIES ALTERNATIVES
Inventors BOULANGER PASCAL
MAYNE MARTINE
PINAULT MATHIEU
CHARON EMELINE
REYNAUD CÉCILE
Designated States
Priority Data 2014074600 14.11.2014 EP
1361119 14.11.2013 FR
Title
(DE) VERFAHREN ZUR KONTINUIERLICHEN HERSTELLUNG VON AUF EINEM SUBSTRAT AUSGERICHTETEN NANOSTRUKTUREN UND ZUGEHÖRIGE VORRICHTUNG
(EN) METHOD FOR CONTINUOUS, TRAVELLING PRODUCTION OF NANOSTRUCTURES ALIGNED ON A SUBSTRATE AND RELATED DEVICE
(FR) PROCEDE DE FABRICATION AU DEFILE ET EN CONTINU DE NANOSTRUCTURES ALIGNEES SUR UN SUPPORT ET DISPOSITIF ASSOCIE
Abstract
(EN)
The invention relates to a method for continuous production of nanostructures aligned on a travelling substrate, which comprises conveying the substrate through a heated space and synthesising, in said space, nanostructures aligned on the substrate by catalytic chemical vapour deposition. The heated space is divided into n consecutive areas in the direction in which the substrate is conveyed (n being an integer > 2) and the synthesis of the nanostructures is the result of heating and injection operations, in each of said n zones, of a stream of an aerosol containing a catalytic precursor and a source precursor of the material of the nanostructures to be formed, carried by a carrier gas. The injection operations are carried out by modifying, in at least two of the n zones, at least one parameter chosen from the flow rate of the stream of carrier gas, the chemical composition of the carrier gas, and the mass concentration of the catalytic precursor in the mixture of the catalytic precursor and the source precursor. The invention also relates to a device for implementing said method.

(FR)
L'invention concerne un procédé de fabrication en continu de nanostructures alignées sur un support défilant, qui comprend le convoyage du support à travers un espace chauffé et la synthèse, dans cet espace, des nanostructures alignées sur le support par dépôt chimique catalytique en phase vapeur. L'espace chauffé est divisé en n zones consécutives dans le sens de convoyage du support (n étant un nombre entier > 2) et la synthèse des nanostructures résulte d'opérations de chauffage et d'injection, dans chacune de ces n zones, d'un flux d'un aérosol contenant un précurseur catalytique et un précurseur source du matériau des nanostructures à former, véhiculé par un gaz porteur. Les opérations d'injection sont réalisées en modifiant, dans au moins deux des n zones, au moins un paramètre choisi parmi le débit du flux du gaz porteur, la composition chimique du gaz porteur, la concentration massique du précurseur catalytique dans le mélange du précurseur catalytique et du précurseur source. L'invention concerne également un dispositif de mise en œuvre de ce procédé.

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