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1. EP1913996 - SURFACE MODIFIED MEMBER, SURFACE TREATING METHOD AND SURFACE TREATING SYSTEM

Office European Patent Office
Application Number 06766776
Application Date 15.06.2006
Publication Number 1913996
Publication Date 23.04.2008
Publication Kind A1
IPC
B PERFORMING OPERATIONS; TRANSPORTING
01
PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
J
CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS, COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
19
Chemical, physical, or physico-chemical processes in general; Their relevant apparatus
C CHEMISTRY; METALLURGY
03
GLASS; MINERAL OR SLAG WOOL
C
CHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
23
Other surface treatment of glass not in the form of fibres or filaments
C CHEMISTRY; METALLURGY
04
CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
B
LIME; MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
41
After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
80
of only ceramics
91
involving the removal of part of the materials of the treated articles, e.g. etching
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
8
Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
06
using gases
08
only one element being applied
10
Oxidising
16
using oxygen-containing compounds, e.g. H2O, CO2
B01J 19/00
C03C 23/00
C04B 41/91
C23C 8/16
CPC
C23C 8/16
C03C 15/00
C03C 17/001
C03C 23/0075
C03C 2217/75
C03C 2218/15
Applicants ASAHI TECH CO LTD
Inventors TAKAYANAGI KOICHIRO
Designated States
Priority Data 2005188584 28.06.2005 JP
2006312042 15.06.2006 JP
Title
(DE) OBERFLÄCHENMODIFIZIERTES ELEMENT,OBERFLÄCHENBEHANDLUNGSVERFAHREN UND OBERFLÄCHENBEHANDLUNGSSYSTEM
(EN) SURFACE MODIFIED MEMBER, SURFACE TREATING METHOD AND SURFACE TREATING SYSTEM
(FR) ÉLÉMENT MODIFIÉ EN SURFACE, PROCÉDÉ DE TRAITEMENT DE SURFACE ET SYSTÈME DE TRAITEMENT DE SURFACE
Abstract
(EN)
A member having high non-electrostatic properties and high hydrophilicity and preventing an adhesion of contaminants, a surface-treating process and an apparatus for the surface-treating process are provided. A surface-treatment apparatus comprises a water vapor-generating unit 1, a superheating unit 5 for superheating a water vapor to generate a superheated water vapor, and a processing unit 11 for spraying the superheated water vapor to a member 14 to be treated (a ceramic, a metal) or for exposing the member to the superheated water vapor. Treating the untreated member with a superheated water vapor having a temperature 300 to 1000°C, hydrophilicity and antistatic properties are imparted to the member. The untreated member may be a member (a window member) contacting with a processing space in a vapor phase surface process apparatus (e.g., a chamber) for the surface process of a substrate by a vapor phase method such as a PVD, a CVD, or a dry etching.