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1. EP1490761 - GRAPHICAL USER INTERFACE (GUI) FOR A SEMICONDUCTOR PROCESSING SYSTEM

Office European Patent Office
Application Number 03736442
Application Date 18.03.2003
Publication Number 1490761
Publication Date 29.12.2004
Publication Kind A2
IPC
G06F 9/44
GPHYSICS
06COMPUTING; CALCULATING OR COUNTING
FELECTRIC DIGITAL DATA PROCESSING
9Arrangements for program control, e.g. control units
06using stored programs, i.e. using an internal store of processing equipment to receive or retain programs
44Arrangements for executing specific programs
G06F 3/14
GPHYSICS
06COMPUTING; CALCULATING OR COUNTING
FELECTRIC DIGITAL DATA PROCESSING
3Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
14Digital output to display device
G05B 19/418
GPHYSICS
05CONTROLLING; REGULATING
BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
19Programme-control systems
02electric
418Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control (DNC), flexible manufacturing systems (FMS), integrated manufacturing systems (IMS), computer integrated manufacturing (CIM)
G06F 3/00
GPHYSICS
06COMPUTING; CALCULATING OR COUNTING
FELECTRIC DIGITAL DATA PROCESSING
3Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
G06F 9/44
GPHYSICS
06COMPUTING; CALCULATING OR COUNTING
FELECTRIC DIGITAL DATA PROCESSING
9Arrangements for program control, e.g. control units
06using stored programs, i.e. using an internal store of processing equipment to receive or retain programs
44Arrangements for executing specific programs
G06K 9/00
GPHYSICS
06COMPUTING; CALCULATING OR COUNTING
KRECOGNITION OF DATA; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS
9Methods or arrangements for reading or recognising printed or written characters or for recognising patterns, e.g. fingerprints
CPC
G05B 19/41865
GPHYSICS
05CONTROLLING; REGULATING
BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
19Programme-control systems
02electric
418Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM]
41865characterised by job scheduling, process planning, material flow
G05B 2219/31334
GPHYSICS
05CONTROLLING; REGULATING
BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
2219Program-control systems
30Nc systems
31From computer integrated manufacturing till monitoring
31334Database with devices, configuration, of plant
G05B 2219/32128
GPHYSICS
05CONTROLLING; REGULATING
BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
2219Program-control systems
30Nc systems
32Operator till task planning
32128Gui graphical user interface
G05B 2219/45031
GPHYSICS
05CONTROLLING; REGULATING
BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
2219Program-control systems
30Nc systems
45Nc applications
45031Manufacturing semiconductor wafers
Y02P 90/14
Y02P 90/16
Applicants TOKYO ELECTRON LTD
Inventors FUNK MERRITT
CHEN WEI
Designated States
Priority Data 0308022 18.03.2003 US
36816202 29.03.2002 US
Title
(DE) GRAPHISCHE BENUTZERSCHNITTSTELLE FÜR EINE HALBLEITERBEHANDLUNGSANLAGE
(EN) GRAPHICAL USER INTERFACE (GUI) FOR A SEMICONDUCTOR PROCESSING SYSTEM
(FR) PROCEDE D'INTERACTION AVEC APPAREIL DE COMMANDE ET STATUT
Abstract
(EN)
A GUI is presented for managing a semiconductor processing system that is comprehensible and standardized in format. The graphical display is organized so that all significant parameters are clearly and logically displayed so that the user is able to perform the desired data collection, monitoring, modeling, and troubleshooting tasks with as little input as possible. The GUI is web-based and is viewable by a user using a web browser. The GUI allows a user to display real-time tool and process module statuses based upon process module events and alarm messages, historical data numerically and/or graphically, SPC charts, APC system logs, and Alarm logs. In addition, the GUI allows a user to print graphs and reports, to save data to files, to export data, to import data, and set up or modify the system.

(FR)
Un GUI est présenté pour la gestion d'un système de traitement à semi-conducteur qui est exhaustif et dont le format est normalisé. L'afficheur graphique est organisé de manière que tous les paramètres significatifs soient clairement et logiquement affichés de manière que l'utilisateur puisse exécuter les tâches de collecte de données souhaitées, de surveillance, de modélisation et de dépannage avec le moins de manipulation possible. Le GUI utilise la Toile et peut être visionné par un utilisateur utilisant un navigateur Web. Le GUI permet à un utilisateur d'afficher les statuts d'un module de traitement et d'un outil en temps réel d'après les événements du module de traitement et des messages d'alarme, des données historiques numériquement et/ou graphiquement, des graphiques SPC, des SYSLOG APC et des logarithmes d'alarme. Le GUI permet, en outre, à un utilisateur d'imprimer des graphiques et des rapports afin d'enregistrer des données dans des fichiers, afin d'exporter des données, d'importer des données et de définir ou de modifier le système.

Also published as
US10951161