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1. (EP2834709) PARTICULATE CONTAMINATION MEASUREMENT METHOD AND APPARATUS

Office : European Patent Office
Application Number: 13713438 Application Date: 28.03.2013
Publication Number: 2834709 Publication Date: 11.02.2015
Publication Kind : A1
Designated States: AL,AT,BA,BE,BG,CH,CY,CZ,DE,DK,EE,ES,FI,FR,GB,GR,HR,HU,IE,IS,IT,LI,LT,LU,LV,MC,ME,MK,MT,NL,NO,PL,PT,RO,RS,SE,SI,SK,SM,TR
Prior PCT appl.: Application Number:EP2013056794 ; Publication Number: Click to see the data
IPC:
G03F 7/20
G PHYSICS
03
PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
F
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
7
Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
20
Exposure; Apparatus therefor
CPC:
G01N 21/94
B32B 37/24
B32B 38/10
B32B 2037/243
G01N 21/47
G01N 21/956
G01N 2001/028
G01N 2001/2833
G01N 2201/06113
G01N 2201/105
G03F 1/82
G03F 7/7085
G03F 7/70908
Applicants: ASML NETHERLANDS BV
TNO
Inventors: DE JONG ANTHONIUS
VAN DER DONCK JACQUES
Priority Data: 2013056794 28.03.2013 EP
201261619209 02.04.2012 US
Title: (DE) PARTIKELKONTAMINATIONSMESSVERFAHREN UND -VORRICHTUNG
(EN) PARTICULATE CONTAMINATION MEASUREMENT METHOD AND APPARATUS
(FR) PROCÉDÉ ET APPAREIL DE MESURE DE CONTAMINATION DE MATIÈRE PARTICULAIRE
Abstract:
(EN) A particulate contamination measurement method and apparatus are discussed. The method, for example, comprises pressing a measurement surface (5) of a polyurethane elastomer (2) against a surface (7) to be measured, removing the polyurethane elastomer from the surface without leaving residues, then using an optical apparatus (11) to detect particles (8) which have been removed by the polyurethane elastomer from the surface and which have become attached to the polyurethane elastomer.
(FR) La présente invention porte sur un procédé et un appareil de mesure de contamination de matière particulaire. Le procédé, par exemple, comprend le pressage d'une surface de mesure (5) d'un élastomère de polyuréthane (2) contre une surface (7) à mesurer, le retrait de l'élastomère de polyuréthane de la surface sans laisser de résidus, puis l'utilisation d'un appareil optique (11) pour détecter des particules (8) qui ont été retirées par l'élastomère de polyuréthane de la surface et qui sont devenues attachées à l'élastomère de polyuréthane.
Also published as:
US20150055127KR1020150013483CN104204954JP6282260JP2015517101WO/2013/149961