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1. DE102014215492 - Sensor zum Erfassen zumindest einer chemischen Spezies und Verfahren zu dessen Herstellung

Office Germany
Application Number 102014215492
Application Date 06.08.2014
Publication Number 102014215492
Publication Date 11.02.2016
Publication Kind A1
IPC
G01N 27/22
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
27Investigating or analysing materials by the use of electric, electro-chemical, or magnetic means
02by investigating impedance
22by investigating capacitance
G01N 27/414
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
27Investigating or analysing materials by the use of electric, electro-chemical, or magnetic means
26by investigating electrochemical variables; by using electrolysis or electrophoresis
403Cells and electrode assemblies
414Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS
H01L 29/78
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
29Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having at least one potential-jump barrier or surface barrier; Capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof
66Types of semiconductor device
68controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified, or switched
76Unipolar devices
772Field-effect transistors
78with field effect produced by an insulated gate
CPC
G01N 27/4145
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
27Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
26by investigating electrochemical variables; by using electrolysis or electrophoresis
403Cells and electrode assemblies
414Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS
4145specially adapted for biomolecules, e.g. gate electrode with immobilised receptors
G01N 27/4146
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
27Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
26by investigating electrochemical variables; by using electrolysis or electrophoresis
403Cells and electrode assemblies
414Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS
4146involving nanosized elements, e.g. nanotubes, nanowires
Applicants Robert Bosch GmbH
Inventors Ante Frederik
Title
(DE) Sensor zum Erfassen zumindest einer chemischen Spezies und Verfahren zu dessen Herstellung
Abstract
(DE)

Die Erfindung betrifft einen Sensor (100) zum Erfassen zumindest einer chemischen Spezies (102), wobei der Sensor (100) eine kapazitive Struktur (104), eine elektrisch isolierende Isolierschicht (106) und eine selbstorganisierende Monolage (108) aufweist. Die kapazitive Struktur (104) ist dazu ausgebildet, eine Kapazität der Struktur (104) in einem elektrischen Kapazitätssignal (110) abzubilden. Die Isolierschicht (106) ist auf der Struktur (104) angeordnet. Die selbstorganisierende Monolage (108) ist auf der Isolierschicht (106) angeordnet. Die Monolage (108) ist aus Molekülen (112) aufgebaut, die an einem ersten Ende (114) mittels einer stabilen Verbindung mit der Isolierschicht (106) verbunden sind und an einem gegenüberliegenden zweiten Ende (116) dazu ausgebildet sind, eine Verbindung mit der Spezies (102) einzugehen.

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