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1. DE102008045387 - Vorrichtung und Verfahren zum Vermessen einer Oberfläche

Office
Germany
Application Number 102008045387
Application Date 02.09.2008
Publication Number 102008045387
Publication Date 04.03.2010
Publication Kind B4
IPC
G01S 17/89
GPHYSICS
01MEASURING; TESTING
SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
17Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
88Lidar systems, specially adapted for specific applications
89for mapping or imaging
G01S 17/10
GPHYSICS
01MEASURING; TESTING
SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
17Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
02Systems using the reflection of electromagnetic waves other than radio waves
06Systems determining position data of a target
08for measuring distance only
10using transmission of interrupted, pulse-modulated waves
G01B 11/24
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
11Measuring arrangements characterised by the use of optical means
24for measuring contours or curvatures
G01S 7/483
GPHYSICS
01MEASURING; TESTING
SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
7Details of systems according to groups G01S13/, G01S15/, G01S17/127
48of systems according to group G01S17/58
483Details of pulse systems
CPC
G01B 11/002
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
11Measuring arrangements characterised by the use of optical means
002for measuring two or more coordinates
G01B 11/24
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
11Measuring arrangements characterised by the use of optical means
24for measuring contours or curvatures
G01S 7/4817
GPHYSICS
01MEASURING; TESTING
SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
7Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
48of systems according to group G01S17/00
481Constructional features, e.g. arrangements of optical elements
4817relating to scanning
G01S 17/10
GPHYSICS
01MEASURING; TESTING
SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
17Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
02Systems using the reflection of electromagnetic waves other than radio waves
06Systems determining position data of a target
08for measuring distance only
10using transmission of interrupted, pulse-modulated waves
G01S 2013/466
GPHYSICS
01MEASURING; TESTING
SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
13Systems using the reflection or reradiation of radio waves, e.g. radar systems; Analogous systems using reflection or reradiation of waves whose nature or wavelength is irrelevant or unspecified
02Systems using reflection of radio waves, e.g. primary radar systems; Analogous systems
06Systems determining position data of a target
46Indirect determination of position data
466by Trilateration, i.e. two antennas or two sensors determine separately the distance to a target, whereby with the knowledge of the baseline length, i.e. the distance between the antennas or sensors, the position data of the target is determined
Applicants Carl Zeiss AG
Inventors Alvarez Diez Cristina
Höller Frank, Dr.
Spruck Bernd
Tremont Marc, Dr.
Agents Kraus & Weisert Patentanwälte PartGmbB
Title
(DE) Vorrichtung und Verfahren zum Vermessen einer Oberfläche
Abstract
(DE)

Vorrichtung zum Vermessen einer Oberfläche (2; 112), umfassend eine Lichtquelle (3) zum Erzeugen einer Folge von Lichtpulsen (61) mit einer Repetitionsrate, eine Lichtlenkeinrichtung (4–6; 4, 114; 4, 132, 134), die kontrollierbar ist, um die Folge von Lichtpulsen auf einen Oberflächenbereich (25; 117) der Oberfläche (2; 112) zu lenken, der aus mehreren Oberflächenbereichen (25, 27; 117) wählbar ist, eine Detektoranordnung (10; 102; 120; 135), die eine Mehrzahl von Detektoren (11–14; 11–13, 104; 11–13) umfasst, die eingerichtet sind, um eine Mehrzahl von von dem Oberflächenbereich (25; 117) in unterschiedliche Richtungen gestreuten und/oder reflektierte Lichtsignalen (21–24; 21–23, 105; 121–123) zu empfangen, und eine Auswerteschaltung (15), die mit der Detektoranordnung (10; 102; 120; 135) gekoppelt ist und eingerichtet ist, um zum Bestimmen einer Position des Oberflächenbereichs (25; 117) für jedes Lichtsignal (21–24; 21–23, 105; 121–123) der Mehrzahl von Lichtsignalen (21–24; 21–23, 105; 121–123) eine Phasendifferenz zwischen einem aus der Folge von Lichtpulsen abgeleiteten Referenzsignal (19; 86) und einer Signalkomponente (51; 81) des entsprechenden Lichtsignals (21–24; 21–23, 105; 121–123) zu ermitteln, wobei die Signalkomponente (51; 81) jeweils eine Frequenz aufweist, die einem Vielfachen der Repetitionsrate entspricht.