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1. (DE102008028990) Process for treating the surface of titanium-aluminum alloys to improve the oxidation resistance of these alloys at specific temperature, by plasma immersion ion implantation using fluorine from e.g. fluorine-containing precursor gas

Office : Germany
Application Number: 102008028990 Application Date: 20.06.2008
Publication Number: 102008028990 Publication Date: 11.02.2010
Publication Kind : B4
IPC:
C23C 14/48
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22
characterised by the process of coating
48
Ion implantation
CPC:
C23C 8/36
Applicants: DECHEMA Gesellschaft für Chemische Technik und Biotechnologie e.V.
Helmholtz-Zentrum Dresden - Rossendorf e.V.
Inventors: Kolitsch Andreas, Dr.
Yankov Rossen, Dr.
Donchev Alexander, Dr.
Schütze Michael, Prof. Dr.
Priority Data:
Title: (DE) Erhöhung der Hochtemperaturoxidationsbeständigkeit von TiAl-Legierungen und daraus bestehenden Bauteilen durch Pl3
(EN) Process for treating the surface of titanium-aluminum alloys to improve the oxidation resistance of these alloys at specific temperature, by plasma immersion ion implantation using fluorine from e.g. fluorine-containing precursor gas
Abstract: front page image
(DE)

Verfahren zur Erhöhung der Hochtemperaturoxidationsbeständigkeit, das heißt in einem Bereich von 700°C bis 1100°C, von TiAl-Legierungen und daraus bestehenden Bauteilen durch Plasma-ImmersationIonenimplantation, dadurch gekennzeichnet, dass Fluor aus fluorhaltigen Precursorgasen oder verdampfbaren organischen oder anorganischen oder polymeren Fluorverbindungen implantiert wird.


(EN)

Process for the treatment of the surface of titanium-aluminum alloys to improve the oxidation resistance of these alloys at 700-1100[deg] C, by plasma immersion ion implantation (PI 3>) using fluorine from fluorine-containing precursor gas or volatile organic or inorganic or polymeric fluorine compounds, is claimed.