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1. CN102203549 - Device and method for measuring a surface

Office
China
Application Number 200980143416.6
Application Date 22.08.2009
Publication Number 102203549
Publication Date 28.09.2011
Grant Number 102203549
Grant Date 09.01.2013
Publication Kind B
IPC
G01B 11/00
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
11Measuring arrangements characterised by the use of optical means
G01B 11/24
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
11Measuring arrangements characterised by the use of optical means
24for measuring contours or curvatures
G01S 17/89
GPHYSICS
01MEASURING; TESTING
SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
17Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
88Lidar systems, specially adapted for specific applications
89for mapping or imaging
CPC
G01B 11/002
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
11Measuring arrangements characterised by the use of optical means
002for measuring two or more coordinates
G01B 11/24
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
11Measuring arrangements characterised by the use of optical means
24for measuring contours or curvatures
G01S 7/4817
GPHYSICS
01MEASURING; TESTING
SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
7Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
48of systems according to group G01S17/00
481Constructional features, e.g. arrangements of optical elements
4817relating to scanning
G01S 17/10
GPHYSICS
01MEASURING; TESTING
SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
17Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
02Systems using the reflection of electromagnetic waves other than radio waves
06Systems determining position data of a target
08for measuring distance only
10using transmission of interrupted, pulse-modulated waves
G01S 2013/466
GPHYSICS
01MEASURING; TESTING
SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
13Systems using the reflection or reradiation of radio waves, e.g. radar systems; Analogous systems using reflection or reradiation of waves whose nature or wavelength is irrelevant or unspecified
02Systems using reflection of radio waves, e.g. primary radar systems; Analogous systems
06Systems determining position data of a target
46Indirect determination of position data
466by Trilateration, i.e. two antennas or two sensors determine separately the distance to a target, whereby with the knowledge of the baseline length, i.e. the distance between the antennas or sensors, the position data of the target is determined
Applicants Zeiss Carl AG
卡尔蔡司股份公司
Inventors Alvarez Diez Cristina
克里斯蒂娜·阿尔瓦雷斯迪兹
Hoeller Frank
弗兰克·霍勒
Spruck Bernd
伯恩德·斯普鲁克
Tremont Marc
马克·特雷蒙特
Agents wu yan
北京市柳沈律师事务所 11105
Title
(EN) Device and method for measuring a surface
(ZH) 用于测量表面的设备和方法
Abstract
(EN) A device for measuring surface (2) comprises a light source (3), a light guiding device (4-6), a detector system (10) and an evaluation circuit (15). The light source (3) generates a sequence of light pulses having a repetition rate. The light guiding device (4-6) can be controlled to guide the sequence of light pulses onto a surface area (25) of the surface (2). The surface area can be selected from a plurality of surface areas (25, 27). The detector system is adapted to receive at least one light signal (21-24) which is scattered and/or reflected by the surface area (25). The evaluation circuit (15) is coupled to the detector system (10) and is adapted to determine a phase difference between the reference signal (19) derived from the sequence of light pulses and a signal component of the at least one light signal (21-24) to determine a position of the surface area (25).; The phase difference is determined for the signal component having a frequency that corresponds to a multiple of the repetition rate.
(ZH)

一种用于测量表面(2)的设备包括光源(3)、光引导装置(4-6)、检测器系统(10)和分析电路(15)。光源(3)产生具有重复率的光脉冲序列。光引导装置(4-6)可被控制以将光脉冲序列引导至表面(2)的表面区域(25)上。所述表面区域可从多个表面区域(25、28)中被选定。检测器系统适于接收被表面区域(25)散射和/或反射的至少一个光信号(21-24)。分析电路(15)被耦连至检测器系统(10)且适于确定由光脉冲序列得出的参考信号(19)和所述至少一个光信号(21-24)的信号分量之间的相位差,以确定表面区域(25)的位置。所述相位差是为频率对应于重复率的倍数的信号分量确定的。