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1. CN101278181 - Checking apparatus and method

Office
China
Application Number 200680036279.2
Application Date 28.09.2006
Publication Number 101278181
Publication Date 01.10.2008
Grant Number 101278181
Grant Date 04.05.2011
Publication Kind B
IPC
G01M 3/40
GPHYSICS
01MEASURING; TESTING
MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
3Investigating fluid tightness of structures
40by using electric means, e.g. by observing electric discharges
CPC
G01M 3/187
GPHYSICS
01MEASURING; TESTING
MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
3Investigating fluid-tightness of structures
02by using fluid or vacuum
04by detecting the presence of fluid at the leakage point
16using electric detection means
18for pipes, cables or tubes; for pipe joints or seals; for valves; ; for welds; for containers, e.g. radiators
186for containers, e.g. radiators
187for flexible or elastic containers
Applicants Nippon Pioneer Corp.
日本先锋公司
日本先锋自动化公司
Inventors Sakaguchi Yoshiichi
坂口能一
Namiki Koji
并木兴治
Agents lihui
北京三友知识产权代理有限公司 11127
Title
(EN) Checking apparatus and method
(ZH) 检查装置及检查方法
Abstract
(EN) Inspection equipment for inspecting a relatively large quantity of inspection objects, i.e. packages for piezoelectric element, in a short time by correctly performing airtight inspection to a small package for piezoelectric element to shorten the inspection time as compared that required for general inspection equipment and making the inspection equipment relatively compact. The inspection equipment (1) performs airtight inspection to an electronic component (a package for piezoelectric element) (2) wherein a piezoelectric element is sealed airtightly.; The inspection equipment comprises a section (1401)(a pressurization chamber (140), a pressurizing unit (146)) for pressurizing the periphery of the package (2) for piezoelectric element under a state where the package (2) is placed in the freely opening/closing pressurization chamber (140), a section (145) for measuring the impedance of the package (2) placed in the pressurizing section (1401), and a control section (17) for calculating a variation amount from the impedance measured at the measuring section (145) when a pressure is applied and not applied, and judging poor airtightness of the electronic component by comparing the variation with a set value.
(ZH)

本发明提供一种检查装置,其可准确地进行小型压电元件用封装的气密检查,其检查时间可比一般的检查装置更短,其可使检查装置比较小型化,其可在短时间内检查较大量的被检查对象的压电元件用封装。检查装置(1)是对气密密封有压电元件的电子元件(压电元件用封装)(2)进行气密检查的检查装置,其具有:加压部(1401)(加压室(140)、加压装置(146)),其在开合自如的加压室(1401)内设置有压电元件用封装(2)的状态下,对该压电元件用封装(2)的周围加压;测定部(145),其对设置于加压部(加压室(140)、加压装置(146))的压电元件用封装2的阻抗进行测定;判别部(171),其根据通过测定部145测定的非加压时和加压时的阻抗计算出变化量,将该变化量与设定值进行比较,判别电子元件的气密性为不良。


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