(EN)
Inspection equipment for inspecting a relatively large quantity of inspection objects, i.e. packages for piezoelectric element, in a short time by correctly performing airtight inspection to a small package for piezoelectric element to shorten the inspection time as compared that required for general inspection equipment and making the inspection equipment relatively compact. The inspection equipment (1) performs airtight inspection to an electronic component (a package for piezoelectric element) (2) wherein a piezoelectric element is sealed airtightly.; The inspection equipment comprises a section (1401)(a pressurization chamber (140), a pressurizing unit (146)) for pressurizing the periphery of the package (2) for piezoelectric element under a state where the package (2) is placed in the freely opening/closing pressurization chamber (140), a section (145) for measuring the impedance of the package (2) placed in the pressurizing section (1401), and a control section (17) for calculating a variation amount from the impedance measured at the measuring section (145) when a pressure is applied and not applied, and judging poor airtightness of the electronic component by comparing the variation with a set value.
(ZH) 本发明提供一种检查装置，其可准确地进行小型压电元件用封装的气密检查，其检查时间可比一般的检查装置更短，其可使检查装置比较小型化，其可在短时间内检查较大量的被检查对象的压电元件用封装。检查装置(1)是对气密密封有压电元件的电子元件(压电元件用封装)(2)进行气密检查的检查装置，其具有：加压部(1401)(加压室(140)、加压装置(146))，其在开合自如的加压室(1401)内设置有压电元件用封装(2)的状态下，对该压电元件用封装(2)的周围加压；测定部(145)，其对设置于加压部(加压室(140)、加压装置(146))的压电元件用封装2的阻抗进行测定；判别部(171)，其根据通过测定部145测定的非加压时和加压时的阻抗计算出变化量，将该变化量与设定值进行比较，判别电子元件的气密性为不良。
