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1. CN101263077 - A method of manufacturing a mems capacitor microphone, a stack of foils comprising such a mems capacitor microphone, an electronic device comprising such a mems capacitor microphone and use of the ele

Office
China
Application Number 200680033035.9
Application Date 24.08.2006
Publication Number 101263077
Publication Date 10.09.2008
Grant Number 101263077
Grant Date 09.11.2011
Publication Kind B
IPC
B81C 1/00
BPERFORMING OPERATIONS; TRANSPORTING
81MICROSTRUCTURAL TECHNOLOGY
CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
1Manufacture or treatment of devices or systems in or on a substrate
CPC
B01L 3/502707
BPERFORMING OPERATIONS; TRANSPORTING
01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
3Containers or dishes for laboratory use, e.g. laboratory glassware
50Containers for the purpose of retaining a material to be analysed, e.g. test tubes
502with fluid transport, e.g. in multi-compartment structures
5027by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
502707characterised by the manufacture of the container or its components
B01L 3/502738
BPERFORMING OPERATIONS; TRANSPORTING
01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
3Containers or dishes for laboratory use, e.g. laboratory glassware
50Containers for the purpose of retaining a material to be analysed, e.g. test tubes
502with fluid transport, e.g. in multi-compartment structures
5027by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
502738characterised by integrated valves
B01L 2200/10
BPERFORMING OPERATIONS; TRANSPORTING
01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
2200Solutions for specific problems relating to chemical or physical laboratory apparatus
10Integrating sample preparation and analysis in single entity, e.g. lab-on-a-chip concept
B01L 2200/12
BPERFORMING OPERATIONS; TRANSPORTING
01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
2200Solutions for specific problems relating to chemical or physical laboratory apparatus
12Specific details about manufacturing devices
B01L 2300/0627
BPERFORMING OPERATIONS; TRANSPORTING
01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
2300Additional constructional details
06Auxiliary integrated devices, integrated components
0627Sensor or part of a sensor is integrated
B01L 2300/0819
BPERFORMING OPERATIONS; TRANSPORTING
01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
2300Additional constructional details
08Geometry, shape and general structure
0809rectangular shaped
0819Microarrays; Biochips
Applicants Koninkl Philips Electronics NV
皇家飞利浦电子股份有限公司
Inventors Langereis Geert
G·兰格赖斯
Weekamp Johannes Wilhelmus
J·W·威坎普
Giesbers Jacobus Bernardus
J·B·吉斯伯斯
Agents gonghai jun tanyou xiang
中国专利代理(香港)有限公司 72001
中国专利代理(香港)有限公司 72001
Priority Data 05108276.6 09.09.2005 EP
Title
(EN) A method of manufacturing a mems capacitor microphone, a stack of foils comprising such a mems capacitor microphone, an electronic device comprising such a mems capacitor microphone and use of the ele
(ZH) 一种制造具有间隔的微系统的方法
Abstract
(EN) The invention relates to a method of manufacturing a microsystem and further to such microsystem. With the method a microsystem can be manufactured by stacking pre-processed foils (10) having a conductive layer (lla, llb) on at least one side. After stacking, the foils (10) are sealed, using pressure and heat. Finally the microsystems are separated from the stack (S). The pre-processing of the foils (preferably done by means of a laser beam) comprises a selection of the following steps: (A) leaving the foil intact, (B) locally removing the conductive layer, (C) removing the conductive layer and partially evaporating the foil (10), and (D) removing both the conductive layer as well as foil (10), thus making holes in the foil (10). In combination with said stacking, it is possible to create cavities, freely suspended cantilevers and membranes. This opens up the possibility of manufacturing various microsystems, like MEMS devices and microfluidic systems.
(ZH)

本发明涉及一种制造微系统的方法并且还涉及该微系统。利用该方法,可以通过层叠在至少一侧上具有导电层(11a,11b)的预处理的箔(10)制造微系统。在层叠之后,使用压力和热来密封这些箔(10)。最后,微系统从叠层(S)分开。箔的预处理(优选通过激光束完成)包括选自以下的步骤:(A)保持箔完整,(B)部分去除导电层,(C)去除导电层和部分蒸发所述箔(10),以及(D)去除导电层以及箔(10),由比在箔(10)上形成孔。结合所述层叠,可以形成空腔,自由悬挂的悬臂以及膜。这使得能够制造不同的微系统,例如MEMS器件和微流系统。