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1. CN101262938 - Surface modified member, surface treating method and surface treating device

Office China
Application Number 200680023499.1
Application Date 15.06.2006
Publication Number 101262938
Publication Date 10.09.2008
Grant Number 101262938
Grant Date 26.10.2011
Publication Kind B
IPC
B PERFORMING OPERATIONS; TRANSPORTING
01
PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
J
CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS, COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
19
Chemical, physical, or physico-chemical processes in general; Their relevant apparatus
C CHEMISTRY; METALLURGY
04
CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
B
LIME; MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
41
After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
80
of only ceramics
91
involving the removal of part of the materials of the treated articles, e.g. etching
C CHEMISTRY; METALLURGY
03
GLASS; MINERAL OR SLAG WOOL
C
CHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
23
Other surface treatment of glass not in the form of fibres or filaments
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
8
Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
06
using gases
08
only one element being applied
10
Oxidising
16
using oxygen-containing compounds, e.g. H2O, CO2
B01J 19/00
C04B 41/91
C03C 23/00
C23C 8/16
CPC
C23C 8/16
C03C 15/00
C03C 17/001
C03C 23/0075
C03C 2217/75
C03C 2218/15
Applicants Asahi Tech Co., Ltd.
迦南精机株式会社
Inventors Takayanagi Koichiro
高柳晃一郎
Agents sunxiu wu libing ai
中国专利代理(香港)有限公司 72001
中国专利代理(香港)有限公司 72001
Priority Data 188584/2005 28.06.2005 JP
Title
(EN) Surface modified member, surface treating method and surface treating device
(ZH) 表面改质构件、表面处理方法及表面处理装置
Abstract
(EN)
A member exhibiting high antistatic properties and hydrophilicity which is capable of preventing adhesion of contaminants, and a method and system for surface treatment. The surface treatment system comprises a steam generation unit (1), an overheating unit (5) for overheating steam to generate overheated steam, and a processing unit (11) for spraying or bringing the overheated steam to a member to be treated (ceramics, metals)(14). The member to be treated can be imparted with hydrophilicity and antistatic properties when it is treated with overheated steam of 300-1000 DEG C. The member to be treated may be a member (window member) in contact with the processing space in a vapor phase surface treatment system (such as a chamber) for surface treating a substrate by vapor phase method such as PVD, CVD, and dry etching.

(ZH)

本发明提供一种构件,具有高度的非静电特性和高度的亲水性并防止污染物的粘附,一种表面处理方法和一种用于该表面处理方法的装置。该表面处理装置包括水蒸汽产生单元1,用于过热水蒸汽以产生过热水蒸汽的过热单元5,和用于喷雾过热水蒸汽到待处理的构件14(陶瓷,金属)或用于暴露该构件到过热水蒸汽的处理单元11。用具有300至1000℃的温度的过热水蒸汽处理未处理的构件,可以赋予构件亲水性和抗静电特性。该未处理的构件可以是与用于采用气相方法例如PVD,CVD或干蚀刻表面处理基底的气相表面处理装置中的处理空间(例如室)接触的构件(窗构件)。