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1. CN101258102 - A method of manufacturing a microsystem, such a microsystem, a stack of foils comprising such a microsystem, an electronic device comprising such a microsystem and use of the electronic device

Office
China
Application Number 200680032943.6
Application Date 24.08.2006
Publication Number 101258102
Publication Date 03.09.2008
Grant Number 101258102
Grant Date 14.09.2011
Publication Kind B
IPC
B81C 1/00
BPERFORMING OPERATIONS; TRANSPORTING
81MICROSTRUCTURAL TECHNOLOGY
CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
1Manufacture or treatment of devices or systems in or on a substrate
CPC
B01L 3/5027
BPERFORMING OPERATIONS; TRANSPORTING
01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
3Containers or dishes for laboratory use, e.g. laboratory glassware
50Containers for the purpose of retaining a material to be analysed, e.g. test tubes
502with fluid transport, e.g. in multi-compartment structures
5027by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
B01L 3/502707
BPERFORMING OPERATIONS; TRANSPORTING
01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
3Containers or dishes for laboratory use, e.g. laboratory glassware
50Containers for the purpose of retaining a material to be analysed, e.g. test tubes
502with fluid transport, e.g. in multi-compartment structures
5027by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
502707characterised by the manufacture of the container or its components
B01L 3/50273
BPERFORMING OPERATIONS; TRANSPORTING
01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
3Containers or dishes for laboratory use, e.g. laboratory glassware
50Containers for the purpose of retaining a material to be analysed, e.g. test tubes
502with fluid transport, e.g. in multi-compartment structures
5027by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
50273characterised by the means or forces applied to move the fluids
B01L 3/502738
BPERFORMING OPERATIONS; TRANSPORTING
01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
3Containers or dishes for laboratory use, e.g. laboratory glassware
50Containers for the purpose of retaining a material to be analysed, e.g. test tubes
502with fluid transport, e.g. in multi-compartment structures
5027by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
502738characterised by integrated valves
B01L 2200/10
BPERFORMING OPERATIONS; TRANSPORTING
01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
2200Solutions for specific problems relating to chemical or physical laboratory apparatus
10Integrating sample preparation and analysis in single entity, e.g. lab-on-a-chip concept
B01L 2200/12
BPERFORMING OPERATIONS; TRANSPORTING
01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
2200Solutions for specific problems relating to chemical or physical laboratory apparatus
12Specific details about manufacturing devices
Applicants Koninkl Philips Electronics NV
皇家飞利浦电子股份有限公司
Inventors Langereis Geert
G·朗格赖斯
Weekamp Johannes Wilhelmus
J·W·维坎普
Giesbers Jacobus Bernardus
J·B·吉斯伯斯
Agents gonghai jun tanyou xiang
中国专利代理(香港)有限公司 72001
中国专利代理(香港)有限公司 72001
Priority Data 05108280.8 09.09.2005 EP
Title
(EN) A method of manufacturing a microsystem, such a microsystem, a stack of foils comprising such a microsystem, an electronic device comprising such a microsystem and use of the electronic device
(ZH) 一种制造设有间隔的微型系统的方法
Abstract
(EN) The invention relates to a method of manufacturing a microsystem and further to such microsystem. With the method a microsystem can be manufactured by stacking pre-processed foils (10) having a conductive layer (11a,11b) on at least one side. After stacking, the foils (10) are sealed, using pressure and heat. Finally the microsystems are separated from the stack (S). The pre-processing of the foils (preferably done by means of a laser beam) comprises a selection of the following steps: (A) leaving the foil intact, (B) locally removing the conductive layer, (C) removing the conductive layer and partially evaporating the foil (10), and (D) removing both the conductive layer as well as foil (10), thus making holes in the foil (10). In combination with said stacking, it is possible to create cavities, freely suspended cantilevers and membranes. This opens up the possibility of manufacturing various microsystems, like MEMS devices and microfluidic systems.
(ZH)

本发明涉及一种制造微型系统的方法以及这样的微型系统。利用所述方法,可以通过堆叠预处理过的箔(10)来制造微型系统,所述箔的至少一侧上具有传导层(11a、11b)。在堆叠之后,使用压力和热将箔(10)粘合。最后将所述微型系统与堆叠(S)分离。箔的所述预处理(优选地利用激光束实现)包括对下列步骤的选择:(A)保持箔完整,(B)局部地除去传导层,(C)除去传导层并部分地蒸发箔(10),以及(D)将传导层和箔(10)都除去,从而在箔(10)中形成孔。与所述堆叠相结合,可以构建洞、自由悬挂翻板和薄膜。这获得了制造各种微型系统的可能,如MEMS设备和微流体系统。