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1. CN101238237 - Initial wetting auxiliary material for a vaporiser body

Office China
Application Number 200680028528.3
Application Date 30.06.2006
Publication Number 101238237
Publication Date 06.08.2008
Grant Number 101238237
Grant Date 06.04.2011
Publication Kind B
IPC
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22
characterised by the process of coating
24
Vacuum evaporation
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
06
characterised by the coating material
14
Metallic material, boron or silicon
20
on organic substrates
C23C 14/24
C23C 14/20
CPC
C23C 14/20
C23C 14/243
Applicants Sintec Keramik GmbH
斯泰克陶瓷有限责任公司
Inventors Goetz Ulrich
乌尔里希·格茨
Nuernberger Michael
迈克尔·尼恩贝格尔
Agents caisheng wei liuji fu
北京集佳知识产权代理有限公司 11227
北京集佳知识产权代理有限公司 11227
Priority Data 102005030862.7 01.07.2005 DE
Title
(EN) Initial wetting auxiliary material for a vaporiser body
(ZH) 用于蒸发器体的初始润湿辅助材料
Abstract
(EN)
The invention relates to an initial wetting auxiliary material which is applied to the vaporiser surface of an electrically heatable ceramic vaporiser body (1), which is to be used in a PVD-metallisation installation to vaporise aluminium, and which contains nitrogen, in particular, in the form of boron nitride, as material components. The initial wetting auxiliary material comprises aluminium which melts on the vaporiser surface thereof after operating the vaporiser body (1) and reacts with the nitrogen of the vaporiser body (1) by forming an aluminium nitride layer on the vaporiser surface, when in the melted state. Said initial wetting auxiliary material also comprises a wetting agent which distributes the melted aluminium in a regular manner and over a large surface of the vaporiser surface.

(ZH)

初始润湿辅助材料,所述辅助材料用于施加到可电加热的陶瓷蒸发器体(1)的蒸发器表面上,所述蒸发器体(1)用于在PVD敷金属装置中运行以蒸发铝并且含有作为材料成分的氮,所述氮优选为氮化硼的形式。所述初始润湿辅助材料包含铝,所述铝在蒸发器体(1)开始运行之后在蒸发器表面上熔化,并且在熔融状态下与所述蒸发器体(1)中的氮反应,由此在蒸发器表面上形成氮化铝层。所述初始润湿辅助材料还包含润湿剂,通过所述润湿剂有助于熔融的铝在所述蒸发器表面上形成均匀的、大的表面分布。