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1. CN101218492 - Temperature measuring device, thermal treatment device using the same, temperature measuring method

Office China
Application Number 200680024509.3
Application Date 04.07.2006
Publication Number 101218492
Publication Date 09.07.2008
Grant Number 101218492
Grant Date 18.08.2010
Publication Kind B
IPC
G PHYSICS
01
MEASURING; TESTING
K
MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
11
Measuring temperature based on physical or chemical changes not covered by group G01K3/, G01K5/, G01K7/, or G01K9/202
12
using change of colour or translucency
G PHYSICS
01
MEASURING; TESTING
K
MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
13
Adaptations of thermometers for specific purposes
G PHYSICS
06
COMPUTING; CALCULATING; COUNTING
F
ELECTRIC DIGITAL DATA PROCESSING
17
Digital computing or data processing equipment or methods, specially adapted for specific functions
30
Information retrieval; Database structures therefor
G01K 11/12
G01K 13/00
G06F 17/30
CPC
G01K 11/125
H01L 21/67248
Applicants Univ Hiroshima
国立大学法人广岛大学
Inventors Higashi Seiichiro
东清一郎
Agents liuxin yu
北京林达刘知识产权代理事务所(普通合伙) 11277
Priority Data 195691/2005 05.07.2005 JP
Title
(EN) Temperature measuring device, thermal treatment device using the same, temperature measuring method
(ZH) 温度测量装置以及利用它的热处理装置、温度测量方法
Abstract
(EN)
There are provided a temperature measuring device, method, and a thermal treatment device which are appropriately used for measuring a temperature of a substrate subjected to thermal treatment performing rapid heating. The temperature measuring device includes: a light intensity measuring unit for applying a laser beam to an object to be heated having a uniquely defined correlation between a temperature and a refractivity and measuring light intensity characteristic X indicating the relationship between a reflected light or a transmitting light obtained by interference of laser beams multiply reflected in the object to be heated and the time; a calculation unit for acquiring a reproduced object to be heated for obtaining a virtual object to be heated having light intensity characteristic Z nearest to the light intensity characteristic X obtained from the virtual object to be heated when applying a thermal load equivalent to the condition of heading the object to be heated and applying a laser beam having characteristic equivalent to the aforementioned leaser beam to the virtual object to be heated; and a temperature output unit for obtaining a temperature of a predetermined portion of the object to be heated at a predetermined time according to the reproduced object to be heated.

(ZH)

提供一种适合进行快速加热来进行热处理的基板温度测量等的温度测量装置以及方法、热处理装置等。该温度测量装置具有:光强度测量部,其对温度和折射率具有唯一相关关系的被加热体照射探测激光,并测量光强度特性X,该光强度特性X表示在被加热体内部多重反射的探测激光的干涉结果所产生的反射光或者透过光的光强度和时间之间的关系;运算部,其用于获取再现被加热体,当对具有与上述被加热体相同的形状、热以及光学特性的虚拟被加热体提供与上述被加热体被加热的条件相同的热负荷、并照射具有与上述探测激光相同特性的探测激光时,求出具有从该虚拟被加热体得到的光强度特性与上述光强度特性X最一致的光强度特性Z的虚拟被加热体而作为再现被加热体;以及温度输出部,其根据上述再现被加热体求出上述被加热体的规定部位在规定时间下的温度。