(EN)
The device (100) comprises a substrate (10) of a semiconductor material with a first and an opposite second surface (1,2) and a microelectromechanical (MEMS) element (50) which is provided with a fixed and a movable electrode (52, 51) that is present in a cavity (30). One of the electrodes (51,52) is defined in the substrate (10). The movable electrode (51) is movable towards and from the fixed electrode (52) between a first gapped position and a second position. The cavity (30) is opened through holes (18) in the substrate (10) that are exposed on the second surface (2) of the substrate (10). The cavity (30) has a height that is defined by at least one post (15) in the substrate (10), which laterally substantially surrounds the cavity (15).
(ZH) 装置(100)包括具有第一表面和相反的第二表面(1，2)的半导体材料基板(10)、和微机电(MEMS)元件(50)，所述微机电元件设有固定电极和可动电极(52，51)，所述可动电极位于空腔(30)中。电极(51，52)中的一个电极限定在基板(10)中。可动电极(51)可在第一间隙位置和第二位置之间向着和从固定电极(52)移动。空腔(30)通过基板(10)中的孔(18)敞开，所述孔(18)暴露在基板(10)的第二表面(2)上。空腔(30)具有由基板(10)中的至少一个柱(15)限定的高度，所述至少一个柱侧向基本上环绕着空腔(15)。
