(EN)
The invention provides an improved substrate rotating device for reducing the amount of particles and a substrate treating device having the substrate rotating device. The substrate rotating device comprises a rotatablely driven body directly or indirectly connected to substrate supporting bodies, for example a driven ring; a rotatablely driving body rotatablely driving the rotatablely driven body by rotating in the state of coming into contact with the rotatablely driven body, for example a driving rotator. The rotatablely driven body and the rotatablely driving body are formed of a ceramics material with JIS R1607 standard of destruction toughness value and/or JIS R1601 standard for three-point bending strength value.
(ZH) 本发明提供一种为了大幅降低颗粒的产生量而进行改良后的基板旋转装置、以及具备该基板旋转装置的基板处理装置。基板旋转装置包括:直接或者间接地连接在基板支承体上的从动旋转体、例如从动环;和在与可动部件接触的状态下,进行旋转从而旋转驱动上述从动旋转体的驱动旋转体、例如,驱动转子。从动旋转体和驱动旋转体,由JIS R1607标准规定的破坏韧性的值以及/或者JIS R1601标准规定的三点弯曲强度的值不同的陶瓷材料构成。