(EN)
A method and an apparatus for testing an array substrate that is a component of a liquid crystal display panel. The method and apparatus realize shortening of the test times and also realize reduction of the equipments. In the method and apparatus, while the array substrate is placed in a tester chamber, an electric signal is supplied to a driver circuit part including at least one of a scan line driver circuit and a signal line driver circuit (S1). The electric signal having flowed through that driver circuit part is detected, thereby testing that driver circuit part (S2). An electron beam is irradiated to a pixel electrode that has been charged, and information of secondary electrons discharged from the pixel electrode is used to perform the test as to the pixel electrode (S5).
(ZH) 本发明涉及检查阵列基板的阵列基板检查方法及阵列基板检查设备,阵列基板是液晶显示板的结构部件。根据本发明的检查阵列基板的方法和检查阵列基板的设备能够缩短检查时间和减少用于检查的设备。在根据本发明的检查阵列基板的方法和用于检查阵列基板的设备中,在阵列基板放进检查室的同时,把电气信号供给到包括扫描线驱动电路和信号线驱动电路中的至少一个的驱动电路单元(S1),以及通过检测流经驱动电路单元的电气信号,检查驱动电路单元(S2)。此外,将电子束照射到用电荷充电了的像素电极,并基于从像素电极发射的二次电子的数据检查像素电极(S5)。