(EN) The invention provides a piezoelectric sensor, a manufacturing method thereof and a detection device and relates to the technical field of sensing. The piezoelectric sensor includes an array substrate, a first cover layer, a first electrode, a piezoelectric film and a second electrode, wherein the first cover layer is located on the array substrate, the first cover layer comprises a first part anda second part, the first part covers the array substrate, a cavity and a first opening are formed between the second part and the array substrate, the first electrode is positioned above the first cover layer and is positioned above the cavity, the piezoelectric film is positioned on the first electrode, and the second electrode is positioned on the piezoelectric film.
(ZH) 本公开提供了一种压电传感器及其制造方法、检测装置,涉及传感技术领域。所述压电传感器包括:阵列基板;第一盖层,位于所述阵列基板上,所述第一盖层包括第一部分和第二部分,其中所述第一部分覆盖所述阵列基板,所述第二部分与所述阵列基板之间具有空腔且具有第一开口;第一电极,位于所述第一盖层的上方,且位于所述空腔的上方;压电薄膜,位于所述第一电极上;以及第二电极,位于所述压电薄膜上。