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1. CN110249081 - DEVICE AND METHOD FOR CLEANING MONOCRYSTAL PULLING APPARATUS

Office China
Application Number 201880009567.1
Application Date 02.02.2018
Publication Number 110249081
Publication Date 17.09.2019
Publication Kind A
IPC
C30B 29/06
CCHEMISTRY; METALLURGY
30CRYSTAL GROWTH
BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
29Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
02Elements
06Silicon
CPC
C30B 15/20
CCHEMISTRY; METALLURGY
30CRYSTAL GROWTH
BSINGLE-CRYSTAL-GROWTH
15Single-crystal growth by pulling from a melt, e.g. Czochralski method
20Controlling or regulating
C30B 29/06
CCHEMISTRY; METALLURGY
30CRYSTAL GROWTH
BSINGLE-CRYSTAL-GROWTH
29Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
02Elements
06Silicon
Applicants SUMCO CORP
胜高股份有限公司
Inventors OKITA KENJI
冲田宪治
Agents 中国专利代理(香港)有限公司 72001
中国专利代理(香港)有限公司 72001
Priority Data PCT/JP2017/003796 02.02.2017 JP
Title
(EN) DEVICE AND METHOD FOR CLEANING MONOCRYSTAL PULLING APPARATUS
(ZH) 单晶提拉装置的清洁装置及清洁方法
Abstract
(EN)
A cleaning device 10 for cleaning the inside of a monocrystal pulling apparatus 1 comprises a main tube part 11 which can be inserted into a pull chamber 1a, and an inner surface cleaning mechanism 17 which is provided at the upper portion of the main tube part and is for cleaning the inner surface of the pull chamber, wherein the main tube part has a retreat/housing part 12 for housing therein a retreating seed chuck provided at the lower portion of a wire, and a continuous extension mechanism 13 which is provided at the lower portion of the main tube part and which enables a plurality of extension rods 13A-13D to be added and to extend in the axial direction, whereby the inside of the pull chamber is efficiently cleaned.

(ZH)
一种清洁装置(10),其对单晶提拉装置(1)内进行清洁,该清洁装置具备能够插入至拉晶室(1a)内的主筒部(11)、且在主筒部的上部具备对拉晶室的内表面进行清洁的内表面清洁机构(17),主筒部在其内部具备退避收纳线材下部的籽晶夹头的退避收纳部(12)、且在主筒部的下部具备能够沿轴向接上多个延伸杆(13A)~延伸杆(13D)的继续延伸机构(13),由此效率良好地进行拉晶室内表面清洁。