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1. CN109634005 - Repairing method in manufacturing process of array substrate

Office China
Application Number 201811459026.7
Application Date 30.11.2018
Publication Number 109634005
Publication Date 16.04.2019
Publication Kind A
IPC
G02F 1/1362
GPHYSICS
02OPTICS
FDEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH IS MODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THE DEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY, COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g. SWITCHING, GATING, MODULATING OR DEMODULATING; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
1Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
01for the control of the intensity, phase, polarisation or colour
13based on liquid crystals, e.g. single liquid crystal display cells
133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
136Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
1362Active matrix addressed cells
CPC
G02F 1/136259
GPHYSICS
02OPTICS
FDEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH IS MODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THE DEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY, COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g. SWITCHING, GATING, MODULATING OR DEMODULATING; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
1Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating, or modulating; Non-linear optics
01for the control of the intensity, phase, polarisation or colour 
13based on liquid crystals, e.g. single liquid crystal display cells
133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
136Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
1362Active matrix addressed cells
136259Repairing; Defects
Applicants SHENZHEN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD.
深圳市华星光电技术有限公司
Inventors HE WEI
何伟
Agents 深圳市德力知识产权代理事务所 44265
深圳市德力知识产权代理事务所 44265
Title
(EN) Repairing method in manufacturing process of array substrate
(ZH) 阵列基板制作过程中的修补方法
Abstract
(EN)
The invention provides a repairing method in a manufacturing process of an array substrate. The repairing method in the manufacturing process of the array substrate comprises the following steps of forming a conductive pattern on a substrate; performing optical detection and electrical detection on the conductive pattern; combining an optical detection result with an electrical detection result, determining positions of defect points on the conductive pattern, and repairing the defect points. The positions of the defect points are determined by combining the optical detection result and the electrical detection result, and therefore the accuracy and the success rate of the defect point searching can be improved and the repairing success rate of the defect points can be improved.

(ZH)
本发明提供一种阵列基板制作过程中的修补方法。该方法包括如下步骤:在基板上形成导电图案;对所述导电图案进行光学检测和电性检测;利用光学检测结果与电性检测结果的结合,确定所述导电图案上的缺陷点的位置,并对所述缺陷点进行修复,通过光学检测结果与电性检测结果结合确定缺陷点的位置,能够提升缺陷点查找的准确率和成功率,改善缺陷点的修补成功率。

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