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1. CN109491214 - Integrated super-resolution laser direct writing device and laser direct writing method

Office China
Application Number 201811473633.9
Application Date 04.12.2018
Publication Number 109491214
Publication Date 19.03.2019
Grant Number 109491214
Grant Date 03.12.2019
Publication Kind B
IPC
G03F 7/20
GPHYSICS
03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
7Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
20Exposure; Apparatus therefor
CPC
G03F 7/2053
GPHYSICS
03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR;
7Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
20Exposure; Apparatus therefor
2051Exposure without an original mask, e.g. using a programmed deflection of a point source, by scanning, by drawing with a light beam, using an addressed light or corpuscular source
2053using a laser
Applicants SHANGHAI INSTITUTE OF OPTICS AND FINE MECHANICS, CHINESE ACADEMY OF SCIENCES
中国科学院上海光学精密机械研究所
Inventors ZENG AIJUN
曾爱军
LIU TIECHENG
刘铁诚
HU JINGPEI
胡敬佩
ZHU LINGLIN
朱玲琳
HUANG HUIJIE
黄惠杰
Agents 上海恒慧知识产权代理事务所(特殊普通合伙) 31317
Title
(EN) Integrated super-resolution laser direct writing device and laser direct writing method
(ZH) 集成化超分辨激光直写装置及直写方法
Abstract
(EN)
The invention relates to an integrated super-resolution laser direct writing device which comprises a continuous laser device, a first optical fiber coupler, a single mode fiber, a second continuous laser device, a second optical fiber coupler, a first annular pohotonic crystal fiber, a bifurcated optical fiber, a lens group, a first dichroscope, an LED light source, lenses, a second dichroscope,an automatic focusing module, a third dichroscope, a third optical fiber coupler, a square rate gradual change optical fiber, a nano displacement table, a second lens, a CMOS camera and a control system. The invention also relates to a direct writing method. According to the invention, optical fibers of key apparatuses and integration of the system are achieved by means of an original free light path based large direct writing device, so that the device and method are applied to the field of laser direct writing field better.

(ZH)
一种集成化超分辨激光直写装置包括连续激光器、第一光纤耦合器、单模光纤、第二连续激光器、第二光纤耦合器、第一环形光子晶体光纤、分叉光纤、透镜组、第一二向色镜、LED光源、透镜、第二二向色镜、自动聚焦模块、第三二向色镜、第三光纤耦合器、平方率渐变光纤、纳米位移台、第二透镜、CMOS相机和控制系统,以及直写方法。本发明可以使得原有的基于自由光路的大型直写装置实现关键器件光纤化和系统集成化,更好的应用于激光直写领域。

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