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1. (CN108700822) DEVICE AND METHOD FOR MOIRe MEASUREMENT OF AN OPTICAL TEST SPECIMEN

Office : China
Application Number: 201780011125.6 Application Date: 27.01.2017
Publication Number: 108700822 Publication Date: 23.10.2018
Publication Kind : A
Prior PCT appl.: Application Number:PCTEP2017051759 ; Publication Number: Click to see the data
IPC:
G03F 7/20
G01M 11/02
G PHYSICS
03
PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
F
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
7
Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
20
Exposure; Apparatus therefor
G PHYSICS
01
MEASURING; TESTING
M
TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
11
Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
02
Testing of optical properties
CPC:
G01M 11/0242
G02B 27/60
G03B 9/02
G03F 7/706
Applicants: ZEISS CARL SMT GMBH
卡尔蔡司SMT有限责任公司
Inventors: SAMANIEGO MICHAEL
M.萨马涅戈
SCHADE PETER
P.谢德
KEIL MICHAEL
M.凯尔
JANKER BERND
B.贾因克
Agents: 北京市柳沈律师事务所 11105
Priority Data: 102016202198.2 12.02.2016 DE
Title: (EN) DEVICE AND METHOD FOR MOIRe MEASUREMENT OF AN OPTICAL TEST SPECIMEN
(ZH) 光学测试样品的莫尔测量的设备和方法
Abstract: front page image
(EN) The invention relates to a device for Moire measurement of an optical test specimen, comprising a grating arrangement composed of a first grating (25, 25', 35, 35'), which is positionable in the optical beam path upstream of the test specimen, and a second grating (11, 11', 11", 41, 51, 61, 71, 81, 91, 101, 111, 121, 131, 141), which is positionable in the optical beam path downstream of the testspecimen, an evaluation unit having at least one detector (12, 12', 12", 22, 22', 32, 32', 42, 52, 62, 72, 82, 92, 102, 112, 122, 132, 142) for evaluating Moire structures produced by superimpositionof the two gratings in a detection plane situated in the optical beam path downstream of the second grating, and at least one aperture stop (14, 14', 14", 24, 24', 34, 34'), by which the light distribution produced after emergence of light from the second grating can be shaded regionally in such a way that only light of a subset of all field points on the second grating reaches the detection plane.
(ZH) 本发明涉及一种光学测试样品的莫尔测量的设备,包括:光栅布置,其由在测试样品上游的光束路径中可定位的第一光栅(25、25’、35、35’)和在测试样品下游的光束路径中可定位的第二光栅(11、11’、11”、41、51、61、71、81、91、101、111、121、131、141)构成;评估单元,其具有至少一个检测器(12、12’、12”、22、22’、32、32’、42、52、62、72、82、92、102、112、122、132、142),在位于第二光栅的下游的光束路径中的检测平面中评估由两个光栅的叠加所产生的莫尔结构;以及至少一个孔径光阑(14、14’、14”、24、24’、34、34’),通过至少一个孔径光阑将在从第二光栅出射的光之后所产生的光分布以区域方式遮蔽,使得仅仅在第二光栅上的所有场点的子集的光到达检测平面。
Also published as:
KR1020180102129EP3414625WO/2017/137266