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1. (CN108604564) SUBSTRATE TRANSFER HAND

Office : China
Application Number: 201780008137.3 Application Date: 27.01.2017
Publication Number: 108604564 Publication Date: 28.09.2018
Publication Kind : A
Prior PCT appl.: Application Number:PCTJP2017002909 ; Publication Number: Click to see the data
IPC:
H01L 21/677
B25J 15/00
B65G 49/06
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21
Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67
Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
677
for conveying, e.g. between different work stations
B PERFORMING OPERATIONS; TRANSPORTING
25
HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; HANDLES FOR HAND IMPLEMENTS; WORKSHOP EQUIPMENT; MANIPULATORS
J
MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
15
Gripping heads
B PERFORMING OPERATIONS; TRANSPORTING
65
CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
G
TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
49
Conveying systems characterised by their application for specified purposes not otherwise provided for
05
for fragile or damageable materials or articles
06
for fragile sheets, e.g. glass
CPC:
H01L 21/68707
B25J 15/0014
B25J 15/0052
B65G 49/061
H01L 21/67742
H01L 21/67766
H05K 9/0079
Applicants: DAIHEN CORPORATION
株式会社达谊恒
Inventors: OKAMOTO KENTARO
冈本健太郎
Agents: 北京尚诚知识产权代理有限公司 11322
北京尚诚知识产权代理有限公司 11322
Priority Data: 2016-015476 29.01.2016 JP
Title: (EN) SUBSTRATE TRANSFER HAND
(ZH) 基板移载用机械手
Abstract: front page image
(EN) To provide a substrate-transfer hand capable of reducing the number of points where contact is made with a substrate, and supporting the substrate in a high-rigidity state. The present invention includes a vertical hand support 20a extending in the vertical direction, and a plurality of horizontal hand supports 31a, 32a connected to the vertical hand support 20a and extending in the direction intersecting the direction in which the vertical hand support 20a extends. The plurality of horizontal hand supports 31a, 32a include a plurality of first horizontal supports 31a and a plurality of secondhorizontal hand supports 32a. Each of the first horizontal hand supports 31a has a plurality of first contacts 40A that can contact the substrate SB, said contacts 40A being aligned in the directionin which the first horizontal supports 31a extend, and the maximum height position of the first contact points 40A is a first height. Each of the second horizontal hand support parts 32a respectivelyhas a plurality of second contacts 40B that can contact the substrate SB, said second contacts 40B being aligned in the direction in which the second horizontal hand supports 32a extend, and the maximum height of the second contact points 40B is a second height that is lower than the first height.
(ZH) 提供一种能够减少与基板接触的接点,并且能够将基板以刚性高的状态进行支承的基板移载用机械手。基板移载用机械手包括在纵向上延伸的纵向机械手支承部(20a),和与该纵向机械手支承部(20a)连结且在与该纵向机械手支承部(20a)延伸的方向交叉的方向上延伸的多个横向机械手支承部(31a、32a),所述多个横向机械手支承部(31a、32a)包括多个第一横向机械手支承部(31a)和多个第二横向机械手支承部(32a),所述各第一横向机械手支承部(31a)分别具有在该第一横向机械手支承部(31a)延伸的方向上排列且能够与所述基板(SB)接触的多个第一接点(40A),该第一接点(40A)的最高高度位置为第一高度,所述各第二横向机械手支承部(32a)分别具有在该第二横向机械手支承部(32a)延伸的方向上排列且能够与所述基板(SB)接触的多个第二接点(40B),该第二接点(40B)的最高高度位置为低于所述第一高度的第二高度。
Also published as:
KR1020180108685US20190035670WO/2017/131148