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1. (CN108602713) LOW CTE BORO-ALUMINOSILICATE GLASS FOR GLASS CARRIER WAFERS

Office : China
Application Number: 201680080139.9 Application Date: 02.02.2016
Publication Number: 108602713 Publication Date: 28.09.2018
Publication Kind : A
Prior PCT appl.: Application Number:PCTCN2016073212 ; Publication Number: Click to see the data
IPC:
C03C 4/02
C CHEMISTRY; METALLURGY
03
GLASS; MINERAL OR SLAG WOOL
C
CHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
4
Compositions for glass with special properties
02
for coloured glass
CPC:
C03C 3/091
C03C 4/00
C03C 4/0085
C03C 27/00
Applicants: SCHOTT GLASS TECH (SUZHOU) CO LTD
肖特玻璃科技(苏州)有限公司
Inventors: QIAN PENGXIANG
钱鹏翔
HOU YUNFEI
后运飞
XUE JUNMING
薛军明
LIEBALD RAINER
R·理拜德
KUROKI HIROSHI
黑木浩
Agents: 北京思益华伦专利代理事务所(普通合伙) 11418
北京思益华伦专利代理事务所(普通合伙) 11418
Priority Data:
Title: (EN) LOW CTE BORO-ALUMINOSILICATE GLASS FOR GLASS CARRIER WAFERS
(ZH) 用于玻璃载体晶片的低CTE硼铝硅酸盐玻璃
Abstract: front page image
(EN) The invention concerns a low CTE boro-aluminosilicate glass having a low brittleness, in particular for the use in wafer level packaging (WLP) applications, with a composition in Mol%of SiO2: 60-85, Al2O3: 1 to 17, B2O3: 8 to 20, Na2O: 0 to 5, K2O: 0 to 5, MgO: 0 to 10, CaO: 0 to 10, SrO: 0 to 10, BaO: 0 to 10, where the average number of non-bridging oxygen per Polyhedron (NBO) is equal or largerthan -0.2 and a ratio B2O3/Al2O3 is equal or larger than 0.5, where the NBO is defined as NBO = 2 * Omol/ (Simol+Almol+Bmol) -4. The invention also concerns a glass carrier wafer made from the low CTE boro-aluminosilicate glass and a use thereof as glass carrier wafer for the processing of a silicon substrate. The invention further concerns a method for providing a low CTE boro-aluminosilicate glass.
(ZH) 本发明涉及一种具有低脆性的低CTE硼铝硅酸盐玻璃,特别是用于在晶片级封装(WLP)应用使用,其具有以摩尔%计的如下组成:SiO2:60‑85,Al2O3:1‑17,B2O3:8‑20,Na2O:0‑5,K2O:0‑5,MgO:0‑10,CaO:0‑10,SrO:0‑10,BaO:0‑10,其中每个多面体的非桥接氧的平均数(NBO)等于或大于‑0.2且B2O3/Al2O3的比值等于或大于0.5,其中NBO定义为NBO=2×Omol/(Simol+Almol+Bmol)‑4。本发明还涉及由低CTE硼铝硅酸盐玻璃制成的玻璃载体晶片及其作为玻璃载体晶片用于处理硅衬底的用途。本发明还涉及一种提供低CTE硼铝硅酸盐玻璃的方法。
Also published as:
WO/2017/132837