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1. CN108475622 - STRUCTURE

Office China
Application Number 201780007099.X
Application Date 23.01.2017
Publication Number 108475622
Publication Date 31.08.2018
Publication Kind A
IPC
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21
Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
02
Manufacture or treatment of semiconductor devices or of parts thereof
027
Making masks on semiconductor bodies for further photolithographic processing, not provided for in group H01L21/18 or H01L21/34165
B PERFORMING OPERATIONS; TRANSPORTING
29
WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
C
SHAPING OR JOINING OF PLASTICS; SHAPING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL; AFTER- TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
33
Moulds or cores; Details thereof or accessories therefor
38
characterised by the material or the manufacturing process
B PERFORMING OPERATIONS; TRANSPORTING
29
WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
C
SHAPING OR JOINING OF PLASTICS; SHAPING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL; AFTER- TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
59
Surface shaping, e.g. embossing; Apparatus therefor
02
by mechanical means, e.g. pressing
H01L 21/027
B29C 33/38
B29C 59/02
CPC
B29C 33/38
B29C 59/02
H01L 21/027
Applicants SOKEN KAGAKU KK
综研化学株式会社
Inventors MIYAZAWA YUKIHIRO
宫泽幸大
SAKATA IKUMI
坂田郁美
Agents 北京汇思诚业知识产权代理有限公司 11444
北京汇思诚业知识产权代理有限公司 11444
Priority Data 2016012844 26.01.2016 JP
Title
(EN) STRUCTURE
(ZH) 结构体
Abstract
(EN)
Provided is a structure having a fine pattern, in which there is less difference in height between regions having different heights in the fine pattern. According to the present invention, there is provided a structure having an elastic layer and a resin layer provided on the upper side of the elastic layer, wherein the resin layer is provided with a fine pattern on the surface on the opposite side from the elastic layer, the fine pattern is provided with a plurality of regions of different height, and the structure is provided with either of configurations (1) or (2): (1) the Young's modulusof the elastic layer is 1 GPa or less; (2) the Young's modulus of the elastic layer is less than the Young's modulus of a substrate supporting the elastic layer.

(ZH)
本发明提供一种具有微细图案的结构体,其微细图案中高度不同区域的高度差小。根据本发明,提供一种结构体,其具有弹性层和设置在其上侧的树脂层,上述树脂层在上述弹性层的相反一侧的面具备微细图案,上述微细图案具有高度不同的多个区域,该结构体具备以下(1)或(2)的构成:(1)上述弹性层的杨氏模量为1GPa以下;(2)上述弹性层的杨氏模量小于支承上述弹性层的基材的杨氏模量。

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