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1. CN107331640 - Wafer box conveying device

Office China
Application Number 201610285760.0
Application Date 29.04.2016
Publication Number 107331640
Publication Date 07.11.2017
Publication Kind A
IPC
H01L 21/677
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
677for conveying, e.g. between different work stations
CPC
H01L 21/67706
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; ; Apparatus not specifically provided for elsewhere
677for conveying, e.g. between different workstations
67703between different workstations
67706Mechanical details, e.g. roller, belt
H01L 21/67724
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; ; Apparatus not specifically provided for elsewhere
677for conveying, e.g. between different workstations
67703between different workstations
67724by means of a cart or a vehicule
H01L 21/6773
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; ; Apparatus not specifically provided for elsewhere
677for conveying, e.g. between different workstations
67703between different workstations
6773Conveying cassettes, containers or carriers
G01S 15/931
GPHYSICS
01MEASURING; TESTING
SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
15Systems using the reflection or reradiation of acoustic waves, e.g. sonar systems
88Sonar systems specially adapted for specific applications
93for anti-collision purposes
931of land vehicles
H01L 21/67294
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; ; Apparatus not specifically provided for elsewhere
67005Apparatus not specifically provided for elsewhere
67242Apparatus for monitoring, sorting or marking
67294using identification means, e.g. labels on substrates or labels on containers
H01L 21/67769
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; ; Apparatus not specifically provided for elsewhere
677for conveying, e.g. between different workstations
67763the wafers being stored in a carrier, involving loading and unloading
67769Storage means
Applicants SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
Inventors LI LINGYU
XU QIXIN
Title
(EN) Wafer box conveying device
(ZH) 一种片盒运输装置
Abstract
(EN)
The invention discloses a wafer box conveying device which comprises the components of an intelligent trolley, a bottom expansion frame which is arranged on the intelligent trolley, and a wafer box carrying frame which is fixed on the bottom expansion frame. The wafer box carrying frame is divided into multiple layers, and each layer is provided with a plurality of wafer box carrying plates, wherein the surface of the wafer box carrying plate is provided with a first trough and a second trough arranged in the first trough. The first trough is used for carrying the wafer box in the first specification. The second trough is used for carrying the wafer box in the second specification. Through the first trough and the second trough, carrying of the two kinds of wafer boxes in different specifications is realized, and therefore the wafer box conveying device is suitable for conveying the wafer boxes in different specifications, thereby improving conveying efficiency. Furthermore, through conveying by the intelligent trolley, laying of a system rail and artificial conveying are not required, thereby realizing automatic wafer box conveying, reducing transportation cost, and saving time and labor.

(ZH)
本发明提供了一种片盒运输装置,所述片盒运输装置包括智能小车、架设在所述智能小车上的底部扩展框架以及固定在所述底部扩展框架上的片盒承载框架,所述片盒承载框架被分隔为多层,每层设有多个片盒承载板;其中,所述片盒承载板表面设置有第一凹槽及设置于所述第一凹槽内的第二凹槽,所述第一凹槽用于承载第一规格的片盒,所述第二凹槽用于承载第二规格的片盒。通过第一凹槽和第二凹槽,实现同一片盒承载板承载两种不同规格的片盒,从而使得片盒运输装置适用两种不同规格的片盒的运输,提高了运输产率。此外,通过智能小车搬运,无需铺设系统轨道及人工参与运输,实现片盒的自动运输的同时降低了运输成本,省时省力。