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1. CN103842784 - Spectroscopic sensor

Office
China
Application Number 201280049230.6
Application Date 10.09.2012
Publication Number 103842784
Publication Date 04.06.2014
Grant Number 103842784
Grant Date 02.09.2015
Publication Kind B
IPC
G01J 3/26
GPHYSICS
01MEASURING; TESTING
JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
3Spectrometry; Spectrophotometry; Monochromators; Measuring colours
12Generating the spectrum; Monochromators
26using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filter
G01J 3/36
GPHYSICS
01MEASURING; TESTING
JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
3Spectrometry; Spectrophotometry; Monochromators; Measuring colours
28Investigating the spectrum
30Measuring the intensity of spectral lines directly on the spectrum itself
36Investigating two or more bands of a spectrum by separate detectors
CPC
G01J 3/26
GPHYSICS
01MEASURING; TESTING
JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
3Spectrometry; Spectrophotometry; Monochromators; Measuring colours
12Generating the spectrum; Monochromators
26using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
G01J 2003/1234
GPHYSICS
01MEASURING; TESTING
JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
3Spectrometry; Spectrophotometry; Monochromators; Measuring colours
12Generating the spectrum; Monochromators
1226Interference filters
1234Continuously variable IF [CVIF]; Wedge type
G01J 3/36
GPHYSICS
01MEASURING; TESTING
JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
3Spectrometry; Spectrophotometry; Monochromators; Measuring colours
28Investigating the spectrum
30Measuring the intensity of spectral lines directly on the spectrum itself
36Investigating two or more bands of a spectrum by separate detectors
G01J 3/513
GPHYSICS
01MEASURING; TESTING
JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
3Spectrometry; Spectrophotometry; Monochromators; Measuring colours
46Measurement of colour; Colour measuring devices, e.g. colorimeters
50using electric radiation detectors
51using colour filters
513having fixed filter-detector pairs
G01J 3/2803
GPHYSICS
01MEASURING; TESTING
JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
3Spectrometry; Spectrophotometry; Monochromators; Measuring colours
28Investigating the spectrum
2803using photoelectric array detector
G01J 2003/2806
GPHYSICS
01MEASURING; TESTING
JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
3Spectrometry; Spectrophotometry; Monochromators; Measuring colours
28Investigating the spectrum
2803using photoelectric array detector
2806Array and filter array
Applicants 浜松光子学株式会社
Inventors 柴山胜己
笠原隆
Agents 北京尚诚知识产权代理有限公司 11322
Priority Data 2011220180 04.10.2011 JP
Title
(EN) Spectroscopic sensor
(ZH) 分光传感器
Abstract
(EN) A spectroscopic sensor (1) has a cavity layer (21) and first and second mirror layers (22, 23) facing each other via the cavity layer (21), and comprises: an interference filter section (20) that selectively transmits light within a prescribed wavelength range, according to the incident position; a light transmission substrate (3) arranged on the first mirror layer (22) side and which transmits light incident to the interference filter section (20); and a light detection substrate (4) arranged on the second mirror layer (23) side and which detects light that has passed through the interference filter section (20). The cavity layer (21) has: a filter region (24) interposed between the first and second mirror layers (22, 23); an annular encircling region (25) that encircles the filter region (24) at a prescribed distance from the filter region (24); and an annular connection region (26) that connects a terminal section (24e) on the light detection substrate (4) side of the filter region (24) and a terminal section (25e) on the light detection substrate (4) side of the encircling region (25).
(ZH)

分光传感器(1)具备:具有空腔层(21)以及经由空腔层(21)而相对的第1以及第2镜层(22,23)并且对应于入射位置选择性地使规定的波长范围的光透过的干涉滤光部(20)、被配置于第1镜层(22)侧并且使入射到干涉滤光部(20)的光透过的光透过基板(3)、被配置于第2镜层(23)侧并且检测透过了干涉滤光部(20)的光的光检测基板(4)。空腔层(21)具有:被第1以及第2镜层(22,23)夹持的滤光区域(24)、从滤光区域(24)取得规定的距离来包围滤光区域(24)的环状的包围区域(25)、连接滤光区域(24)的光检测基板(4)侧的端部(24e)和包围区域(25)的光检测基板(4)侧的端部(25e)的环状的连接区域(26)。


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