(EN) A spectroscopic sensor (1) has a cavity layer (21) and first and second mirror layers (22, 23) facing each other via the cavity layer (21), and comprises: an interference filter section (20) that selectively transmits light within a prescribed wavelength range, according to the incident position; a light transmission substrate (3) arranged on the first mirror layer (22) side and which transmits light incident to the interference filter section (20); and a light detection substrate (4) arranged on the second mirror layer (23) side and which detects light that has passed through the interference filter section (20). The cavity layer (21) has: a filter region (24) interposed between the first and second mirror layers (22, 23); an annular encircling region (25) that encircles the filter region (24) at a prescribed distance from the filter region (24); and an annular connection region (26) that connects a terminal section (24e) on the light detection substrate (4) side of the filter region (24) and a terminal section (25e) on the light detection substrate (4) side of the encircling region (25).
(ZH)
分光传感器(1)具备:具有空腔层(21)以及经由空腔层(21)而相对的第1以及第2镜层(22,23)并且对应于入射位置选择性地使规定的波长范围的光透过的干涉滤光部(20)、被配置于第1镜层(22)侧并且使入射到干涉滤光部(20)的光透过的光透过基板(3)、被配置于第2镜层(23)侧并且检测透过了干涉滤光部(20)的光的光检测基板(4)。空腔层(21)具有:被第1以及第2镜层(22,23)夹持的滤光区域(24)、从滤光区域(24)取得规定的距离来包围滤光区域(24)的环状的包围区域(25)、连接滤光区域(24)的光检测基板(4)侧的端部(24e)和包围区域(25)的光检测基板(4)侧的端部(25e)的环状的连接区域(26)。