PATENTSCOPE will be unavailable a few hours for maintenance reason on Tuesday 19.11.2019 at 4:00 PM CET
Search International and National Patent Collections
Some content of this application is unavailable at the moment.
If this situation persists, please contact us atFeedback&Contact
1. (CA2626230) SYSTEM AND METHOD FOR SURFACE INSPECTION OF MICRO AND NANOMECHANICAL STRUCTURES

Office : Canada
Application Number: 2626230 Application Date: 13.07.2006
Publication Number: 2626230 Publication Date: 18.01.2007
Publication Kind : A1
Prior PCT appl.: Application Number:ES2006000405 ; Publication Number: Click to see the data
IPC:
G01D 5/28
G01M 11/08
G01Q 60/24
G01Q 70/18
B82Y 15/00
G PHYSICS
01
MEASURING; TESTING
D
MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED BY A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; TRANSFERRING OR TRANSDUCING ARRANGEMENTS NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
5
Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
26
using optical means, i.e. using infra-red, visible or ultra-violet light
28
with deflection of beams of light, e.g. for direct optical indication
G PHYSICS
01
MEASURING; TESTING
M
TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
11
Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
08
Testing of mechanical properties
G PHYSICS
01
MEASURING; TESTING
Q
SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING-PROBE MICROSCOPY [SPM]
60
Particular types of SPM [Scanning-Probe Microscopy] or apparatus therefor; Essential components thereof
24
AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
G PHYSICS
01
MEASURING; TESTING
Q
SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING-PROBE MICROSCOPY [SPM]
70
General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/196
16
Probe manufacture
18
Functionalisation
B PERFORMING OPERATIONS; TRANSPORTING
82
NANO-TECHNOLOGY
Y
SPECIFIC USES OR APPLICATIONS OF NANO-STRUCTURES; MEASUREMENT OR ANALYSIS OF NANO-STRUCTURES; MANUFACTURE  OR TREATMENT OF NANO-STRUCTURES
15
Nano-technology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
CPC:
G01Q 10/06
G01Q 20/02
G01Q 70/06
Applicants: CONSEJO SUPERIOR DE INVESTIGACIONES CIENTIFICAS
Inventors: TAMAYO DE MIGUEL, FRANCISCO JAVIER
MERTENS, JOHAN
CALLEJA GOMEZ, MONTSERRAT
Priority Data: EP 05380157.7 14.07.2005 EP
Title: (EN) SYSTEM AND METHOD FOR SURFACE INSPECTION OF MICRO AND NANOMECHANICAL STRUCTURES
(FR) SYSTEME ET METHODE D'INSPECTION SUPERFICIELLE DES STRUCTURES MICROMECANIQUES ET NANOMECANIQUES
Abstract:
(EN) The invention relates to a system for the inspection of surfaces, which is configured to detect vibration and/or relative displacement characteristics at different points of various elements (51) forming part of a mechanical structure (5), such as a micro or nanomechanical structure. According to the invention, a light beam is moved by the mechanical structure along a first path (A) in order to detect different successive reference positions (C) along the length of said path (A) and the light beam is also moved by the mechanical structure along various secondary paths (B) which are each associated with one of the aforementioned reference positions (C). In addition, the invention relates to a corresponding method and a program for performing said method.


Also published as:
JP2009501327US20090207404CN101278357WO/2007/006834